Preparation and properties of COx films

Structural and mechanical properties of amorphous silicon carbonitride films prepared by vapor-transport chemical vapor deposition

“…Additionally, as nitrogen is a trivalent atom, any substituted C atom by a N one would leave at least one dangling bond, which would also tend to lower the mechanical performance of the films. In addition, the incorporation of hydrogen (from NH 3 ) in the films, represented in Si-H, N-H bonds, further decreases both H and E as reported by Kulikovsky et al [53]. In addition, the decrease of both H and E could be also related to the difference in microstructure (fully dense or porous films) as discussed previously in the Surface morphology section, since textured films with a porous network possess limited mechanical properties, due to a moderate coordination number [54].…”

Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas

“…It indicates the decrease of the silicon content in the films. Evident up-shift of the G-band and its increasing asymmetry supports this conclusion [3,18]. The frequencies of the G-band are collected in the second column of Table 2.…”

“…The former corresponds to the second order feature of a-Si, the latter to the vibrations of the Si-H n species ( [17] and references therein). As the CH 4 flow rate increases to 3 sccm, another weak broad band at about 750 cm − 1 emerges, which may be attributed to the formation of the Si-C bonds [3]. As expected, the band corresponding to the Si-H n vibrations shifts to higher wavenumbers as the CH 4 flow rate increases [17].…”

“…Its position shifts up with an increasing amount of CH 4 . It is known that its frequency is directly related to the composition of the Si x C 1-x system ( [3,18] and references therein). The concentration of Si determined for each film in this way and using EPMA analysis is listed in Table 1 (these values agree within 3% with those determined using the data given in Ref.…”

“…Amorphous hydrogen-free SiC films (a-SiC) also have a high level of hardness but significantly lower level of intrinsic stress [1][2][3], better thermal stability and adhesion particularly to the steel substrates. However they possess considerably higher coefficient of friction in comparison with amorphous carbon films (a-C) especially at high loads [4,5].…”