2020
DOI: 10.1016/j.spmi.2020.106400
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Preparation and optimization of SnOx thin film by solution method at low temperature

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Cited by 6 publications
(3 citation statements)
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“…All these advantages are in line with the mainstream concepts of environmental protection, greenness and energy conservation, as well as being conducive to long-term development. Besides, the solution method is suitable for large-area film production and suitable for large-scale production in factories.Otherwise, in our previous research [17], the X-ray photoelectron spectroscopy (XPS) characterization shows that the atomic ratio of SnO 2 in the SnOx film, which is annealed at 100 • C by solution method is 94.49%. It can be deduced from this that the composition of the film samples annealing at 300 • C is mostly SnO 2 in this research.…”
mentioning
confidence: 90%
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“…All these advantages are in line with the mainstream concepts of environmental protection, greenness and energy conservation, as well as being conducive to long-term development. Besides, the solution method is suitable for large-area film production and suitable for large-scale production in factories.Otherwise, in our previous research [17], the X-ray photoelectron spectroscopy (XPS) characterization shows that the atomic ratio of SnO 2 in the SnOx film, which is annealed at 100 • C by solution method is 94.49%. It can be deduced from this that the composition of the film samples annealing at 300 • C is mostly SnO 2 in this research.…”
mentioning
confidence: 90%
“…Otherwise, in our previous research [17], the X-ray photoelectron spectroscopy (XPS) characterization shows that the atomic ratio of SnO 2 in the SnOx film, which is annealed at 100 • C by solution method is 94.49%. It can be deduced from this that the composition of the film samples annealing at 300 • C is mostly SnO 2 in this research.…”
mentioning
confidence: 90%
“…For example, for the speed of 1 m min −1 and the oven length of 5 m, the curing time of each treatment layer is limited to 5 min [27,[35][36][37], while these methods require a longer treatment time. Solution-processed deposition offers the advantages of a simple process, high-throughput, high material utilization rate, and easy control of chemical components, which provides the possibility for large-area preparation of metal oxide semiconductor [10][11][12][13][14]. In the study of solution preparation of MOS-TFT, the active layer is mainly made of precursor prepared by sol-gel [15,16] or nanoparticles (NPs) dispersed in carrier solvent [17][18][19], which are deposited on the substrate by spin coating method, inkjet printing method and so on.…”
Section: Introductionmentioning
confidence: 99%