2021
DOI: 10.24996/ijs.2021.62.7.10
|View full text |Cite
|
Sign up to set email alerts
|

Preparation and Characterization of In2O3-CuO Nanocomposite Thin Films as NH3 Gas Sensor

Abstract: An NH3 gas sensor was prepared from nanocomposite films of indium oxide-copper oxide mixtures with ratios of 0 , 10 , and 20 Vol % of copper oxide. The films were deposited on a glass substrate using chemical spray pyrolysis method (CSP) at 400oC. The structural properties were studied by using X-ray diffraction (XRD) and atomic force microscopy ( AFM). The structural results showed that the prepared thin films are polycrystalline, with nano grain size. By mixing copper oxide with indium oxide, the grain size … Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1

Citation Types

0
0
0

Year Published

2021
2021
2023
2023

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(3 citation statements)
references
References 17 publications
0
0
0
Order By: Relevance
“…где ε 0 -электрическая постоянная; ε r -статическая диэлектрическая проницаемость, которая равна 10. [11,41,42]. Несмотря на не столь высокую чувствительность, значения S оказались относительно высокими при существенно меньших n g и T max , что вероятно связано с особенностями структур, которые приводят к высокой чувствительности, но существенно ограничивают быстродействие [35,45,46…”
Section: механизм газовой чувствительности пленок In 2 Ounclassified
“…где ε 0 -электрическая постоянная; ε r -статическая диэлектрическая проницаемость, которая равна 10. [11,41,42]. Несмотря на не столь высокую чувствительность, значения S оказались относительно высокими при существенно меньших n g и T max , что вероятно связано с особенностями структур, которые приводят к высокой чувствительности, но существенно ограничивают быстродействие [35,45,46…”
Section: механизм газовой чувствительности пленок In 2 Ounclassified
“…Films In 2 O 3 , obtained by the HVPE method show a very high sensitivity to NH 3 . The values of T max and the corresponding values of the maximum response (S max ) at fixed n g are presented and compared with other papers [11,[38][39][40][41][42][43][44] in Table 3. The most interesting results were shown by NH 3 sensors based on In 2 O 3 [11,41,42].…”
Section: Comparison Of Gas Sensitivity To Nh 3 Structures Based On In...mentioning
confidence: 99%
“…The values of T max and the corresponding values of the maximum response (S max ) at fixed n g are presented and compared with other papers [11,[38][39][40][41][42][43][44] in Table 3. The most interesting results were shown by NH 3 sensors based on In 2 O 3 [11,41,42]. Despite the not so high sensitivity, the S values turned out to be relatively high at significantly lower n g and T max , which is probably due to structural features that lead to high sensitivity, but significantly limit the performance [35,45,46].…”
Section: Comparison Of Gas Sensitivity To Nh 3 Structures Based On In...mentioning
confidence: 99%