Preparation and characterisation of carbon nitride films deposited by pulsed laser arc deposition

Investigation of carbon nitride films deposited by ion beam-assisted deposition with low bombarding energy of N ions

“…CNx films could be prepared by several deposition techniques, such as laser arc deposition [1,13], ion sputtering [14,15], chemical vapor deposition [16,17] and so on. The films produced by different methods possess different properties.…”