Prediction of nanopattern topography using two-dimensional focused ion beam milling with beam irradiation intervals

Han, Jin Woo; Lee, Hiwon; Min, Byung Kwon; Lee, Sang Jo

doi:10.1016/j.mee.2009.05.010

Cited by 24 publications

(9 citation statements)

References 19 publications

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“…After ZnO thin film removal it was observed that the topography obtained in the hybrid photonic crystal was transferred to the silicon substrate. In fact, this PhC topography has been predicted in previous theoretical investigations for FIB fabrication method (Han, Lee, Min & Lee, 2010). Figure 3 shows a close view of the photonic structure after ZnO thin film removal.…”

Section: Resultssupporting

confidence: 78%

Selective reflection in two-dimensional hybrid photonic structures of Si-ZnO

Carrillo-Vázquez

Murillo-Ramírez²,

Antúnez-Flores³

et al. 2015

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Hybrid two-dimensional photonic crystal structure described by a square lattice of circular air columns with embedded quasi-circular micro-cavities in a square array was fabricated on Si-ZnO substrate using the focused ion beam (FIB) technique. The optical characterization of this photonic device revealed its ability to selectively enhance the reflectance on specific wave lengths in the border of visible-near-infrared range (VIS-NIR). The behavior of the photonic hetero-structure built and studied in this work was attributed to the coupling of the probe light beam with the embedded micro-cavities in the regular square lattice of air columns describing the photonic crystal. The results obtained in this work suggest the presence of a photonic band gap around the border of VIS-NIR range in the studied hybrid photonic structure. RESUMENSe fabricó una estructura fotónica híbrida bi-dimensional mediante el método de haz enfocado de iones (FIB), descrita por una red cuadrada de columnas circulares de aire con un patrón de micro-cavidades cuasi-circulares embebido, describiendo un arreglo cuadrado en un sustrato de Si-ZnO. La caracterización óptica de este dispositivo fotónico reveló su habilidad para mejorar selectivamente la reflectancia en longitudes de onda específicas en el borde de los rangos visible-infrarrojo cercano (VIS-NIR). Este comportamiento de la hetero-estructura fotónica construida y estudiada en este trabajo se atribuyó al acoplamiento del haz de luz de prueba con las micro-cavidades embebidas en la red cuadrada regular de columnas de aire que describen el cristal fotónico. Los resultados encontrados en este trabajo sugieren la presencia de una brecha fotónica prohibida alrededor de la frontera del rango VIS-NIR.

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Section: Resultssupporting

confidence: 78%

Selective reflection in two-dimensional hybrid photonic structures of Si-ZnO

Carrillo-Vázquez

Murillo-Ramírez²,

Antúnez-Flores³

et al. 2015

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“…Test structures were milled assuming a linear relationship between pixel intensity and milling depth. The varying nanofunnel width, however, was found to cause deviation from a linear milling rate, likely due to the dependence of sputtering yield on the beam angle of incidence and the impact of feature dimensions on material redeposition 37 . The pixel intensities in the bitmap image were therefore empirically adjusted to compensate for these nonlinear effects, resulting in a nearly uniform aspect ratio (depth:width) along the entire length of the nanofunnel.…”

Section: Methodsmentioning

confidence: 99%

Enhanced nanochannel translocation and localization of genomic DNA molecules using three-dimensional nanofunnels

et al. 2017

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The ability to precisely control the transport of single DNA molecules through a nanoscale channel is critical to DNA sequencing and mapping technologies that are currently under development. Here we show how the electrokinetically driven introduction of DNA molecules into a nanochannel is facilitated by incorporating a three-dimensional nanofunnel at the nanochannel entrance. Individual DNA molecules are imaged as they attempt to overcome the entropic barrier to nanochannel entry through nanofunnels with various shapes. Theoretical modeling of this behavior reveals the pushing and pulling forces that result in up to a 30-fold reduction in the threshold electric field needed to initiate nanochannel entry. In some cases, DNA molecules are stably trapped and axially positioned within a nanofunnel at sub-threshold electric field strengths, suggesting the utility of nanofunnels as force spectroscopy tools. These applications illustrate the benefit of finely tuning nanoscale conduit geometries, which can be designed using the theoretical model developed here.

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“…The milled feature's profile decreases as the depth increases due to several characteristics of the milling process: the Gaussian-like beam profile, the sputtering yield dependence on the angle of incidence (self-focusing), and the redeposition of material. 24,25 Third, it protects the substrate's top surface from redeposition of material and structural deformations typically observed along the edges of features milled directly into substrates. 26 Following the milling of channels into the substrate underlying the metal film, the metal is removed using a chemical etch and the nanoscale features are sealed with a cover plate to yield the final nanochannels.…”

mentioning

confidence: 99%

Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling

Ménard

Ramsey²

2011

Nano Lett.

171

139

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The use of focused ion beam (FIB) milling to fabricate nanochannels with critical dimensions extending below 5 nm is described. FIB milled lines have narrowing widths as they are milled deeper into a substrate. This focusing characteristic is coupled with a two-layered architecture consisting of a relatively thick (>100 nm) metal film deposited onto a substrate. A channel is milled through the metal layer until it penetrates a prescribed depth into the substrate material. The metal is then removed, leaving a nanochannel with smooth surfaces and lateral dimensions as small as sub-5 nm. These open nanochannels can be sealed with a cover plate and the resulting devices are well-suited for single-molecule DNA transport studies. This methodology is used with quartz, single-crystal silicon, and polydimethylsiloxane substrates to demonstrate its general utility.

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Prediction of nanopattern topography using two-dimensional focused ion beam milling with beam irradiation intervals

Cited by 24 publications

References 19 publications

Selective reflection in two-dimensional hybrid photonic structures of Si-ZnO

Selective reflection in two-dimensional hybrid photonic structures of Si-ZnO

Enhanced nanochannel translocation and localization of genomic DNA molecules using three-dimensional nanofunnels

Fabrication of Sub-5 nm Nanochannels in Insulating Substrates Using Focused Ion Beam Milling

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