Prediction of ion-bombarded surface topographies using Frank's kinematic theory of crystal dissolution

Barber, D. J.; Frank, F. C.; Moss, Maurice O.; Steeds, John W; Tsong, I. S. T.

doi:10.1007/bf00756635

Cited by 178 publications

(50 citation statements)

References 23 publications

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“…The ripple morphology of ion bombarded surfaces has been initially discovered in the mid 1970's [4][5][6]. Since then, a number of research groups have provided detailed quantitative results regarding the ripple characteristics and dynamics of ripple formation.…”

Section: A Ripple Formationmentioning

confidence: 99%

Morphology of ion-sputtered surfaces

Makeev

Cuerno

Barabási

2002

Nuclear Instruments and Methods in Physics Research Section B:

479

527

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We derive a stochastic nonlinear continuum theory to describe the morphological evolution of amorphous surfaces eroded by ion bombardment. Starting from Sigmund's theory of sputter erosion, we calculate the coefficients appearing in the continuum equation in terms of the physical parameters characterizing the sputtering process. We analyze the morphological features predicted by the continuum theory, comparing them with the experimentally reported morphologies. We show that for short time scales, where the effect of nonlinear terms is negligible, the continuum theory predicts ripple formation. We demonstrate that in addition to relaxation by thermal surface diffusion, the sputtering process can also contribute to the smoothing mechanisms shaping the surface morphology. We explicitly calculate an effective surface diffusion constant characterizing this smoothing effect, and show that it is responsible for the low temperature ripple formation observed in various experiments. At long time scales the nonlinear terms dominate the evolution of the surface morphology. The nonlinear terms lead to the stabilization of the ripple wavelength and we show that, depending on the experimental parameters such as angle of incidence and ion energy, different morphologies can be observed: asymptotically, sputter eroded surfaces could undergo kinetic roughening, or can display novel ordered structures with rotated ripples. Finally, we discuss in detail the existing experimental support for the proposed theory, and uncover novel features of the surface morphology and evolution, that could be directly tested experimentally.

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Section: A Ripple Formationmentioning

confidence: 99%

Morphology of ion-sputtered surfaces

Makeev

Cuerno

Barabási

2002

Nuclear Instruments and Methods in Physics Research Section B:

479

527

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“…As M 2 rises, the value of Y(θ max )/Y(0) falls but θ max itself remains relatively constant. The effect of energy occurs through Eqns (3) and (7). The main effect is that, for E E th , f is given approximately by f s , values of which are shown in Fig.…”

Section: Angular Dependence Of Sputtering Yieldmentioning

confidence: 97%

“…They also associated Wehner's cone shape with the angle, θ max , at which the sputtering yield maximizes. Later, Barber et al [7] analyzed general shapes, based on Frank's dissolution theory. [8] Carter et al [9] extended that work and confirmed the development of cones with their surfaces inclined with their normals at θ max to the ion beam direction.…”

Section: Introductionmentioning

confidence: 99%

Topography effects and monatomic ion sputtering of undulating surfaces, particles and large nanoparticles: Sputtering yields, effective sputter rates and topography evolution

Seah

2011

Surface & Interface Analysis

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An analysis is provided of the change in topography and consequent apparent change in sputtering yields of surfaces as a result of ion sputtering using Yamamura et al.'s model for the angular dependence of the sputtering yield for monatomic primary ions. This is extended to provide a general scheme for any monatomic primary ion and any amorphous elemental solid target. Details are provided of the topographic changes for surfaces with an undulating cosine profile sputtered with primary ions normal to, and at 45• to, the average surface and also for spherical particles. Smoothing occurs at normal incidence and both smoothing and roughening can occur at 45• . Predictions show how the sputtering rate of the material varies with the depth sputtered as a result of the topographical changes, the rate either increasing or decreasing. The effect of roughening usually increases the sputtering rate with values increasing up to four times. The effect of sample rotation is a fast smoothing. Conditions are described for the optimal profiling of particles with a layered structure and calculated profiles are evaluated. The effect of rotation on particles is discussed in relation to different instrumental geometries. In this work, recoil mixing, redeposition, diffusion and the topographic effects at the size of the individual ion cascade are ignored.

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“…Specimens prepared in this way exhibited some surface irregularities (34), but all the artifacts due to the specimen preparation method could easily be identified since these were present in all specir~ns. All the microscopy was done using a HU-650 transmission electron microscope operating at 650 kV.…”

Section: B Atomic Arrangementsmentioning

confidence: 99%

Defects, phase transformations and magnetic properties of lithium ferrite

Mishra¹

1977

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Prediction of ion-bombarded surface topographies using Frank's kinematic theory of crystal dissolution

Cited by 178 publications

References 23 publications

Morphology of ion-sputtered surfaces

Morphology of ion-sputtered surfaces

Topography effects and monatomic ion sputtering of undulating surfaces, particles and large nanoparticles: Sputtering yields, effective sputter rates and topography evolution

Defects, phase transformations and magnetic properties of lithium ferrite

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