Part of the mission of NBS is to disseminate knowledge in the scientific and technical community.To aid in reaching this objective, the Analytical Chemistry Division has sponsored a series of workshops on various topics in analytical chemistry. The workshop topics are chosen to fulfill current needs for detailed discussions on sharply defined subjects in a wide variety of specialist areas.The objective is to bring together specialists from throughout the world to concentrate intensively on a particular subject in order to advance the state-of-the-art.It is often very difficult to achieve this goal at large international meetings where the size and diversity of topics presented often limits detailed discussion of special subjects.Past topics of these workshops and the published proceedings include:Quantitative The workshop format consisted of a keynote talk on each topic followed by extensive discussions. The papers in this volume are based on the keynote talks augmented with some points raised in the discussion.The extensive development of electron beam instrumentation for the microscopy and analysis of samples of diverse scientific interest has resulted in a need for detailed studies of the origin and characteristics of the signals involved. This publication provides a detailed view of one approach to the study of such signals, namely the Monte Carlo technique for electron trajectory calculation.The publication should be of value to the numerous workers who utilize the scanning electron microscope and electron probe microanalyzer. The utility of electron probe microanalysis and scanning electron microscopy is demonstrated by the fact that more than 2500 such instruments costing from $25,000 to $200,000 are now in use worldwide, and more instruments are constantly being added. Moreover, the instruments are at work in fields as diverse as biology, metallurgy, electronics, chemistry, and forensic science.Simultaneously with the development and distribution of the instrumentation, much work has been devoted to the study of electron interactions with solids with the purpose of characterizing the signals which are utilized in microscopy and analysis.One approach which has proven especially useful in both qualitative and quantitative studies of electron interactions is that of Monte Carlo electron trajectory simulation.Monte Carlo calculations have enabled scientists to visualize the electron interaction volume in solids as to size and shape, to predict the parameters characterizing the secondary and back-scattered electrons, the x-rays, and the Auger electrons, and to analyze factors which determine resolution in micrographs.The purpose of the present workshop was to bring together a number of workers in Monte Carlo trajectory techniques to assess the current state of development and to look for areas of future development.The list of participants in the meeting does not include all active workers in the field, but we hope that this document contains a reasonably complete description of the subject.By examining the a...