Predicting the Failure Probability of Device Features in MEMS

Pierce, David M.; Zeyen, B.; Huigens, B.M.; Fitzgerald, Alissa M.

doi:10.1109/tdmr.2011.2159117

Cited by 4 publications

(2 citation statements)

References 21 publications

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“…In 2011, Fitzgerald's model was further explored by proposing the concept of structural failure probability density (FPI). According to the stress distribution on the surface of the structure, the FPI quantified the failure probability of different parts of the microstructure [121]. Based on Fitzgerald's model, K Nagayoshi obtained similar results through stretching and bending experiments on single crystal silicon samples in 2010 [122].…”

Section: • Reliability Quantification For General Structuresmentioning

confidence: 97%

Reliability of MEMS in Shock Environments: 2000–2020

Peng

You

2021

Micromachines

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The reliability of MEMS in shock environments is a complex area which involves structural dynamics, fracture mechanics, and system reliability theory etc. With growth in the use of MEMS in automotive, IoT, aerospace and other harsh environments, there is a need for an in-depth understanding of the reliability of MEMS in shock environments. Despite the contributions of many articles that have overviewed the reliability of MEMS panoramically, a review paper that specifically focuses on the reliability research of MEMS in shock environments is, to date, absent. This paper reviews studies which examine the reliability of MEMS in shock environments from 2000 to 2020 in six sub-areas, which are: (i) response model of microstructure, (ii) shock experimental progresses, (iii) shock resistant microstructures, (iv) reliability quantification models of microstructure, (v) electronics-system-level reliability, and (vi) the coupling phenomenon of shock with other factors. This paper fills the gap around overviews of MEMS reliability in shock environments. Through the framework of these six sub-areas, we propose some directions potentially worthy of attention for future research.

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Section: • Reliability Quantification For General Structuresmentioning

confidence: 97%

Reliability of MEMS in Shock Environments: 2000–2020

Peng

You

2021

Micromachines

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“…Similar to analog electronic systems, the mechanical components of MEMS have nonlinear nature. Therefore, analog and mixed signal tests [28] including verification and calibration are essential for MEMS. The test problem for MEMS is exacerbated due to their inherent diverse properties.…”

Section: Difference Between Ics and Mems Testingmentioning

confidence: 99%

A Review on Key Issues and Challenges in Devices Level MEMS Testing

et al. 2016

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The present review provides information relevant to issues and challenges in MEMS testing techniques that are implemented to analyze the microelectromechanical systems (MEMS) behavior for specific application and operating conditions. MEMS devices are more complex and extremely diverse due to the immersion of multidomains. Their failure modes are distinctive under different circumstances. Therefore, testing of these systems at device level as well as at mass production level, that is, parallel testing, is becoming very challenging as compared to the IC test, because MEMS respond to electrical, physical, chemical, and optical stimuli. Currently, test systems developed for MEMS devices have to be customized due to their nondeterministic behavior and complexity. The accurate measurement of test systems for MEMS is difficult to quantify in the production phase. The complexity of the device to be tested required maturity in the test technique which increases the cost of test development; this practice is directly imposed on the device cost. This factor causes a delay in time-to-market.

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Uncertainties in the friction moment of rolling bearings based on the Bayesian theory and robust theory

Xia

2018

Neural Comput & Applic

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Predicting the Failure Probability of Device Features in MEMS

Cited by 4 publications

References 21 publications

Reliability of MEMS in Shock Environments: 2000–2020

Reliability of MEMS in Shock Environments: 2000–2020

A Review on Key Issues and Challenges in Devices Level MEMS Testing

Uncertainties in the friction moment of rolling bearings based on the Bayesian theory and robust theory

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