Abstract:The desire for thin-film silicon is motivated by the growing needs for flexible electronics, compact packaging, and advanced solar power. In previous work we have presented exfoliation as means cost effective way to achieve thin-film silicon and described an open loop prototype exfoliation tool that could be used to produce improved films compared to previous methods. However, controllable film thickness, film uniformity, and surface roughness were all challenges with the open loop setup. This paper describes … Show more
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