Precision position control using combined piezo-VCM actuators

Liu, Yung-Tien; Fung, Rong‐Fong; Wang, Chun-Chao

doi:10.1016/j.precisioneng.2004.12.009

Cited by 62 publications

(25 citation statements)

References 10 publications

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“…A closer look into the applications of piezoelectricity including biosensing, 3 energy generation, 4À6 pressure sensing, 7 high precision positioning, 8 artificial muscle and skin 9,10 reveals that thermally stable, flexible, and stretchable piezoelectric materials are required to be produced with high yields and in a cost-effective way for the fabrication of commercially feasible, large area, self-powering, and highly efficient devices. Although ceramic piezoelectric materials can present higher piezoelectric coefficients, they suffer from high brittleness, low cyclic endurance, high processing temperature and high production cost as well as toxic elemental composition in contrast to properties of polymer piezoelectric materials.…”

mentioning

confidence: 99%

Spontaneous High Piezoelectricity in Poly(vinylidene fluoride) Nanoribbons Produced by Iterative Thermal Size Reduction Technique

et al. 2014

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We produced kilometer-long, endlessly parallel, spontaneously piezoelectric and thermally stable poly(vinylidene fluoride) (PVDF) micro- and nanoribbons using iterative size reduction technique based on thermal fiber drawing. Because of high stress and temperature used in thermal drawing process, we obtained spontaneously polar γ phase PVDF micro- and nanoribbons without electrical poling process. On the basis of X-ray diffraction (XRD) analysis, we observed that PVDF micro- and nanoribbons are thermally stable and conserve the polar γ phase even after being exposed to heat treatment above the melting point of PVDF. Phase transition mechanism is investigated and explained using ab initio calculations. We measured an average effective piezoelectric constant as -58.5 pm/V from a single PVDF nanoribbon using a piezo evaluation system along with an atomic force microscope. PVDF nanoribbons are promising structures for constructing devices such as highly efficient energy generators, large area pressure sensors, artificial muscle and skin, due to the unique geometry and extended lengths, high polar phase content, high thermal stability and high piezoelectric coefficient. We demonstrated two proof of principle devices for energy harvesting and sensing applications with a 60 V open circuit peak voltage and 10 μA peak short-circuit current output. (Figure Presented). © 2014 American Chemical Society

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confidence: 99%

Spontaneous High Piezoelectricity in Poly(vinylidene fluoride) Nanoribbons Produced by Iterative Thermal Size Reduction Technique

et al. 2014

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“…When the motion stage moves near the desired position, control action is shifted to the MIC to shorten the positioning time. Figure 12 shows the block diagram of a switching algorithm from the MAC II control force, 1 c , to the MIC control force, 2 c . In general, the control force of the MIC is not equal to that of the MAC II at switching instant.…”

Section: Dual Controller Designmentioning

confidence: 99%

“…In order to eliminate this phenomenon, the initial condition of the MIC should be adjusted properly. Since the MIC is a PI controller, the controlled force 2 c can be computed as ) (…”

Section: Dual Controller Designmentioning

confidence: 99%

“…The experimental results indicated that it totally took 0.8 second to reach the 100µm target position with 10nm positioning accuracy. A VCM-PZT actuator and a capacitance-type gap sensor with 10nm resolution make the ultra precision system in Liu's work (2) . Liu et al (2) designed an integral variable structure controller (IVSC) to control the coarse stage and an impact force controller (IFC) to control the fine stage.…”

Section: Introductionmentioning

confidence: 99%

“…A VCM-PZT actuator and a capacitance-type gap sensor with 10nm resolution make the ultra precision system in Liu's work (2) . Liu et al (2) designed an integral variable structure controller (IVSC) to control the coarse stage and an impact force controller (IFC) to control the fine stage. It totally took 1.253 second to reach the target position of 450µm with 10nm positioning accuracy.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Dual-Position-Controller Design for the Linear-Motor-Driven Motion System

Huang

Horng

Shih³

et al. 2007

JSDD

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This work develops a dual-controller composed of a macroscopic controller (MAC) and a microscopic controller (MIC) for improving motion precision of a linear-motor-driven motion system. Based on the macroscopic model in which Coulomb friction model is considered, the MAC is designed. In the presliding region however, the MIC design is based on the lineralized microscopic model. Furthermore, a switching algorithm is developed for bumpless transfer in shifting control action between two controllers. Thus, when the table of motion stage moves to the desired position, the control action can be smoothly switched from the MAC to the MIC. The whole system with the proposed dual-controller has the advantage that it serves as a long stroke (coarse stage) and a short stroke (fine stage) to achieve high precision motion control. The experimental results reveal that it totally takes 2.59 seconds to reach the 1000µm target position with the accuracy of one BLU (basic length unit; sensor resolution), 20nm; the result has over 29% improvement when compared with the result using single MAC. In addition, good nanometer-scale tracking performance with the accuracy of one BLU, 20nm, can be obtained by using the MIC.

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Dual‐Stroke Uniaxial Flexure Stage

2016

Design and Implementation of Large‐Range Compliant Micropositioning Systems

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Precision position control using combined piezo-VCM actuators

Cited by 62 publications

References 10 publications

Spontaneous High Piezoelectricity in Poly(vinylidene fluoride) Nanoribbons Produced by Iterative Thermal Size Reduction Technique

Spontaneous High Piezoelectricity in Poly(vinylidene fluoride) Nanoribbons Produced by Iterative Thermal Size Reduction Technique

Dual-Position-Controller Design for the Linear-Motor-Driven Motion System

Dual‐Stroke Uniaxial Flexure Stage

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