Precision measurements and control of an automated two-dimensional grid plate testing machine

Application of computer vision and laser interferometer to the inspection of line scale

“…But this will confine the vision system to a smaller working area due to the reduced field of view of the system. To solve such a problem, Vira and Alagudu [11] combined the laser interferometer, precision translation stage, and computer vision to form an inspection system to inspect a grid plate. Although the developed system could measure locations of grid points with an accuracy of 0.5 mm, the imaging system accuracy needed to be improved to precisely locate the position of the grid-mark center.…”