International Progress in Precision Engineering 1993
DOI: 10.1016/b978-0-7506-9484-1.50022-1
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Precision Grinding and Slicing of Si-Wafers

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“…König et al 13 suggest suppression of white layers with coolants. Zurecki et al 11 show that cryogenic nitrogen spray cooling at the cutting tool and the tool–workpiece contact limits the thickness of white layer, but others14,15 indicate no such effect.…”
Section: Introductionmentioning
confidence: 99%
“…König et al 13 suggest suppression of white layers with coolants. Zurecki et al 11 show that cryogenic nitrogen spray cooling at the cutting tool and the tool–workpiece contact limits the thickness of white layer, but others14,15 indicate no such effect.…”
Section: Introductionmentioning
confidence: 99%