2008
DOI: 10.1007/s11465-008-0063-9
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Precision control system of two-DOF stage with linear ultrasonic motor

Abstract: Using an appropriate control method, linear ultrasonic motors can be used in applications requiring high position accuracy. In this paper, a closed loop PI control system is designed to achieve high position accuracy during the control of a two-DOF stage driven by linear ultrasonic motors. Two ultrasonic motors are mounted on the stage to generate motion in two orthogonal directions. The PI control algorithm is used to increase the stability and accuracy of position control. The x-axis mover covers 30 mm forwa… Show more

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Cited by 3 publications
(3 citation statements)
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“…The entire rotor's mass and inertia are M r and J r , respectively. f (13) The contact diagram is shown in Fig. 1(c).…”
Section: Free Vibration Of Statormentioning
confidence: 99%
See 1 more Smart Citation
“…The entire rotor's mass and inertia are M r and J r , respectively. f (13) The contact diagram is shown in Fig. 1(c).…”
Section: Free Vibration Of Statormentioning
confidence: 99%
“…These motors transmit power via frictional force at the contact area between the stator and rotor, which originates from the traveling wave generated along the circumferential direction of the stator [8]. Advantageous features such as high stalling torque [9,10], fast response [11], magnetic resonance compatibility [12,13], and high precision motion without magnetization are the motor's strengths because microscopic stepping motion can be achieved by controlling the actuating voltages. Therefore, the ultrasonic motor is widely used in precise manufacturing, robots, and telescope zoom lens [14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…However, MEDM machine tools with good performance are very rare. Although much work has been done on MEDM machine tools, and considerable progress obtained [2][3][4][5]. It is still difficult to machine complicated workpieces with these devices, because some have no NC functions, and other's functions are very limited due to the use of special motion controllers [5] 。As a result, it is necessary to develop a MEDM machine tool with general NC functions and special functions for MEDM machining.…”
Section: Introductionmentioning
confidence: 99%