Precise wavelength control for DFB laser diodes by novel corrugation delineation method

Uniformity of the lasing wavelength of heterogeneously integrated InP microdisk lasers on SOI

“…A multiple-wavelength distributed feedback laser diode (DFB-LD) array, with precisely controllable wavelengths is a very attractive light source for use in WDM systems. The use of electron-beam lithography for the definition of the grating pitch allows reaching a standard deviation as low as 0.37nm across 2-inch wafers [12]. The deviations in threshold current and in maximum output power of DFB lasers coupled to SOI have been reported [13].…”

Phase-Shift Bragg Grating in Silicon Using Equivalent Phase-Shift Method

“…Since the sampling period is large, the wavelength of the phase-shift is much easier to control. For example, to make a phase-shift Bragg-grating array at 1.5 m wavelength range using the EPS method with m and nm, the step size of the sampling period is around 250 nm to generate a resonance wavelength spacing of 25 GHz ( nm), which is 500 times larger than directly changing the grating period in a conventional phase-shift grating [8]. The proposed method and fabrication process is thus highly tolerant of fabrication inaccuracies, enabling low-cost lithography to be used as well as mass production.…”

Scatterometry measurement of ingaasp/inp grating for DFB lasers grown with MOVPE

“…Stable wavelengths of DFB lasers are also required for wavelength division multiplexing (WDM) network systems [6][7][8]. Furthermore, uncooled, directly modulated DFB-LDS are one of the key devices for 10 GB/s Ethernet and OC-192 applications in recent years [9][10][11][12].…”