Pre-stages of the Formation of Ge3N4 on the Surface of Syngle-crystal Germanium in Hydrazine Vapors

Abstract

The interaction of hydrazine vapors with single-crystal germanium was studied by using the thermogravimetric method. The article considers the processes taking place on the surface of Ge up to the formation of Ge3N4 nitride, in particular, the accumulation of N2H4+H2O vapors and their etching with water vapor contained in hydrazine.