Practical non-contact surface measuring instrument with one nanometre resolution

Kohno, Tsuguo; Ozawa, Norimitsu; Miyamoto, Kozo; Musha, Tohru

doi:10.1016/0141-6359(85)90008-x

Cited by 23 publications

(5 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In our experiments, tan u had a maximum value of 0.521. If β is less than 1 • , then tan u tan β = 9.1 × 10 − 3 1, and therefore the error caused by the tilt angle of a sample surface can be neglected.…”

Section: The Tilt Problemmentioning

confidence: 99%

“…The laser beam is focused on the sample surface by an objective lens. The focus information contained in the laser beam reflected from the sample surface can be transformed into variations in spot shape [3,4] and intensity [5] for detection. The signal from the photodetector is input to a servo focus-control system to adjust the position of the objective lens so that the focus spot is always on the sample surface.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Scanning focus-sensing method for measuring the surface shape of a fish scale

Zeng

Líu

Matsumoto³

et al. 1998

Meas. Sci. Technol.

View full text Add to dashboard Cite

A scanning focus-sensing (SFS) method has been developed for measuring the surface shape of a fish scale. This method uses an acousto-optic deflector as a diffractive scanner to allow the laser beam to scan an objective lens, and then uses the resulting focused spot to scan the sample surface. The focus information contained in the laser beam scattered from the sample surface is then transformed into the movement of the spot on a position sensor for detection. The measurement error caused by variations in the shape or intensity of the spot can therefore be reduced. We successfully applied the method to measure the surface shape of a fish scale.

show abstract

Section: The Tilt Problemmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Scanning focus-sensing method for measuring the surface shape of a fish scale

Zeng

Líu

Matsumoto³

et al. 1998

Meas. Sci. Technol.

View full text Add to dashboard Cite

show abstract

“…An alternative option is the commercial infrared sensor [12,13] currently used on the inspection workstation in the AMRF. profiling [16,17] and ultrasonic profiling [10].…”

Section: Surface Texturementioning

confidence: 99%

Progress report of the quality in automation project for FY88

Lovett¹

1989

View full text Add to dashboard Cite

This document describes a quality control architecture that uses real-time sensing, deterministic metrology methods, machine tool characterization, process-intermittent gauging, and process certification to control automated machining processes. The architecture was developed for the quality in automation (QIA) project which has the twofold objective of reducing the reliance on traditional post-process inspection methods and moving toward greater reliance on in-process verification. The QIA project is developing a computer-based system that includes realtime sensors, a quality database, quality monitors, quality controllers, an inspection station, and a communication network, which allows data to flow among components of the quality system. The quality architecture includes control loops such as post-processing characterization, preprocessing characterization, process-intermittent gauging and real-time '^'7

show abstract

“…The surface topographic techniques can be divided into three major categories: profiling techniques, area techniques, and microscopic techniques. The profiling techniques can also be separated into stylus profiling techniques [8], fringe-field capacitance [9], optical sectioning [10], interferometry [11], and focus detection [12]. The second category, area techniques, includes optical scattering [13], ultrasonic [14], and areal capacitance [15].…”

Section: Introductionmentioning

confidence: 99%

Non-contact, in-line inspection of surface finish of crankshaft journals

Bamberger

Hong

Katz

et al. 2011

Int J Adv Manuf Technol

View full text Add to dashboard Cite

Crankshaft bearings of an automotive engine require smooth and high reliability performance as they operate in a harsh environment of heat, pressure, abrasion, and chemical attack that may cause wear. The bearings are designed to meet high precision tolerances and require high-quality surface finish and surface topography. The journals are first grounded and finally polished to an outstanding surface finish in the order of sub-micrometers. In a mass production process, the tapes that are used for final polish may break without being revealed by the automation. Therefore, it is essential to provide an in-line inspection system for such parts to eliminate manual inspection. In order to achieve this goal, we developed a machine vision technique to validate that all journals were polished and detect the unpolished ones. In utilizing this technique, a full-size prototype go/no-go demonstrator was built to validate the performance and reliability of the method. The sensitivity of the system is high enough to differentiate sub-micron level roughness change of the crankshaft surface.

show abstract

Practical non-contact surface measuring instrument with one nanometre resolution

Cited by 23 publications

References 9 publications

Scanning focus-sensing method for measuring the surface shape of a fish scale

Scanning focus-sensing method for measuring the surface shape of a fish scale

Progress report of the quality in automation project for FY88

Non-contact, in-line inspection of surface finish of crankshaft journals

Contact Info

Product

Resources

About