Abstract:A scanning focus-sensing (SFS) method has been developed for measuring the surface shape of a fish scale. This method uses an acousto-optic deflector as a diffractive scanner to allow the laser beam to scan an objective lens, and then uses the resulting focused spot to scan the sample surface. The focus information contained in the laser beam scattered from the sample surface is then transformed into the movement of the spot on a position sensor for detection. The measurement error caused by variations in the … Show more
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