Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems

Abstract

Power consumption is forecast by the International Technology Roadmap of Semiconductors (ITRS) to pose long-term technical challenges for the semiconductor industry. The purpose of this paper is threefold: (1) to provide an overview of strategies for powering MEMS via non-regenerative and regenerative power supplies; (2) to review the fundamentals of piezoelectric energy harvesting, along with recent advancements, and (3) to discuss future trends and applications for piezoelectric energy harvesting technology. The paper concludes with a discussion of research needs that are critical for the enhancement of piezoelectric energy harvesting devices.

On the energy harvesting potential of piezoaeroelastic systems

“…1 Typically, cantilevers with piezoceramics are used as piezoelectric energy harvesters and the source of excitation is assumed to be base motion. [2][3][4][5][6] Researchers have investigated linear 2,3 and nonlinear [4][5][6] piezoelectric energy harvesting under deterministic and nondeterministic excitations.…”

Electromechanical-Traffic Model of Compression-Based Piezoelectric Energy Harvesting

“…Presently, the most frequently utilized in engineeringfield of piezoceramics are PZT-5A and PZT-5H [15]. The piezoelectric model used in this study is PZT-5H which is a soft ceramic material that comes with a greater piezoelectric coefficient (direct charge coefficient), 33 d as well as larger dielectric permittivity, T 33 H .…”

MEMS Technologies for Energy Harvesting

“…Piezoelectric transduction is an advantageous mechanism to convert vibrationto-electric energy for small scales as stated by Marin et al [61] and Cook et al [62]. Marin studied the relationship between the effective material volume (ν) and the output power for different mechanisms.…”