Abstract:The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and its application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. Next, the chapter follows with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as by placing fixed magnets, buckling of beams, or by … Show more
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