Power-efficient silicon nitride thermo-optic phase shifters for visible light

Yong, Zheng; Chen, Hong; Luo, Xianshu; Gövdeli, Alperen; Chua, Hongyao; Azadeh, Saeed Sharif; Stalmashonak, Andrei; Lo, Guo‐Qiang; Poon, Joyce K. S.; Sacher, Wesley D.

doi:10.1364/oe.448614

Cited by 42 publications

(26 citation statements)

References 25 publications

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“…The TiN heater above the ring was used for thermal tuning, and the microring did not use the suspended heater structure in ref. 23 which required clearance around the waveguide. We simultaneously measured the output power at the through port and the photocurrent while tuning the ring for an input wavelength of 514 nm.…”

Section: Resultsmentioning

confidence: 99%

Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

Lin

Yong

Luo³

et al. 2022

Nat Commun

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Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of >60% across a record wavelength span from λ ~ 400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 ± 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.

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Section: Resultsmentioning

confidence: 99%

Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

Lin

Yong

Luo³

et al. 2022

Nat Commun

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“…Owing to the low thermo-optic coefficients of AlO x , the required applied voltages are relatively high compared to those used in silicon phase shifters, and the associated local thermal perturbations lead to slow thermal drifts for non-thermally stabilized photonic chips. In general on-chip thermal-phase shifters can response in sub-milliseconds for each phase stepping, when temperature controllers are used on the backside of the photonic chip 37 . The current chip is not thermally stabilized as usually done with a Peltier element in order to minimize the overall electrical power consumption, which results in a low accuracy of the phase value adjustment as a trade-off.…”

Section: Methodsmentioning

confidence: 99%

UV photonic integrated circuits for far-field structured illumination autofluorescence microscopy

et al. 2022

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Ultra-violet (UV) light has still a limited scope in optical microscopy despite its potential advantages over visible light in terms of optical resolution and of interaction with a wide variety of biological molecules. The main challenge is to control in a robust, compact and cost-effective way UV light beams at the level of a single optical spatial mode and concomitantly to minimize the light propagation loss. To tackle this challenge, we present here photonic integrated circuits made of aluminum oxide thin layers that are compatible with both UV light and high-volume manufacturing. These photonic circuits designed at a wavelength of 360 nm enable super-resolved structured illumination microscopy with conventional wide-field microscopes and without modifying the usual protocol for handling the object to be imaged. As a biological application, we show that our UV photonic chips enable to image the autofluorescence of yeast cells and reveal features unresolved with standard wide-field microscopy.

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“…For example, 473 nm was used in [17] for neuron stimulation, and 674 nm was chosen in [18] for accessing 88 Sr + trapped ion qubits. Because silicon is not transparent below the wavelength of 1100 nm, another CMOS-compatible material, SiN, is employed [30,[89][90][91].…”

Section: Other Emerging Free-space Applicationsmentioning

confidence: 99%

Free-Space Applications of Silicon Photonics: A Review

2022

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Silicon photonics has recently expanded its applications to delivering free-space emissions for detecting or manipulating external objects. The most notable example is the silicon optical phased array, which can steer a free-space beam to achieve a chip-scale solid-state LiDAR. Other examples include free-space optical communication, quantum photonics, imaging systems, and optogenetic probes. In contrast to the conventional optical system consisting of bulk optics, silicon photonics miniaturizes an optical system into a photonic chip with many functional waveguiding components. By leveraging the mature and monolithic CMOS process, silicon photonics enables high-volume production, scalability, reconfigurability, and parallelism. In this paper, we review the recent advances in beam steering technologies based on silicon photonics, including optical phased arrays, focal plane arrays, and dispersive grating diffraction. Various beam-shaping technologies for generating collimated, focused, Bessel, and vortex beams are also discussed. We conclude with an outlook of the promises and challenges for the free-space applications of silicon photonics.

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Power-efficient silicon nitride thermo-optic phase shifters for visible light

Cited by 42 publications

References 25 publications

Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

UV photonic integrated circuits for far-field structured illumination autofluorescence microscopy

Free-Space Applications of Silicon Photonics: A Review

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