“…The 6H SiC polytype is the most studied (6H has triple periodicity in the stacking sequence of the hexagonal planes compared to 2H), with 4H and 3C gathering more and more interest. Silicon vacancies, silicon-carbon divacancies, and vacancy clusters have been studied in as-grown, irradiated, and implanted SiC (Brauer et al, 1996;Kawasuso et al, 1996;Polity, Huth, and Lausmann, 1999;Ling, Beling, and Fung, 2000;Henry et al, 2003;Aavikko et al, 2007). The optical ionization levels of vacancy defects have also been studied (Arpiainen et al, 2002) using positron spectroscopies.…”