1996
DOI: 10.1103/physrevb.54.3084
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Positron studies of defects in ion-implanted SiC

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Cited by 116 publications
(95 citation statements)
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“…Based on the magnitude of the longest lifetime component ͑ cl = 340± 40 ps͒, we can estimate the size of the vacancy clusters. This lifetime can be compared to those reported in SiC, 26 where the Si vacancy to SiC bulk lifetime ratio is close to the Zn vacancy to ZnO bulk lifetime ratio. We estimate that the clusters consist of at most five missing Zn-O pairs, as there is no reason to assume that these clusters would be Zn rich or O rich.…”
Section: Origin Of the Defectsmentioning
confidence: 99%
“…Based on the magnitude of the longest lifetime component ͑ cl = 340± 40 ps͒, we can estimate the size of the vacancy clusters. This lifetime can be compared to those reported in SiC, 26 where the Si vacancy to SiC bulk lifetime ratio is close to the Zn vacancy to ZnO bulk lifetime ratio. We estimate that the clusters consist of at most five missing Zn-O pairs, as there is no reason to assume that these clusters would be Zn rich or O rich.…”
Section: Origin Of the Defectsmentioning
confidence: 99%
“…The 6H SiC polytype is the most studied (6H has triple periodicity in the stacking sequence of the hexagonal planes compared to 2H), with 4H and 3C gathering more and more interest. Silicon vacancies, silicon-carbon divacancies, and vacancy clusters have been studied in as-grown, irradiated, and implanted SiC (Brauer et al, 1996;Kawasuso et al, 1996;Polity, Huth, and Lausmann, 1999;Ling, Beling, and Fung, 2000;Henry et al, 2003;Aavikko et al, 2007). The optical ionization levels of vacancy defects have also been studied (Arpiainen et al, 2002) using positron spectroscopies.…”
Section: Novel Semiconductors: Iii-n Sic and Znomentioning
confidence: 99%
“…This can be linked with the thermal annealing processing at high ions dose. 33 It is worth to note that the temperature during proton irradiation seems to play a significant role in inducing vacancies, presumably due to the temperature dependence on defect mobility.…”
Section: Resultsmentioning
confidence: 99%