Positioning control effectiveness of optical knife edge displacement sensor-embedded monolithic precision stage

Lee, ChaBum; Lee, Sun-Kyu; Tarbutton, Joshua A.

doi:10.1016/j.sna.2015.07.035

Cited by 24 publications

(5 citation statements)

References 26 publications

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“…An optical interrupter (fixed emitter-detector pair with a moving knife edge to partially interrupt the beam) was used to measure the moving platform's motion during milling. Prior efforts have shown that the CMD can be successfully used for accurate force measurement compared to an industry-standard cutting force dynamometer (Kistler 9257B) [41][42][43]. Given the compliant nature of the CMD, it was necessary to explore the stability behavior.…”

Section: Discussionmentioning

confidence: 99%

“…An optical interrupter (ROHM RPI-0352E) was selected as the measurement transducer ($0.33-$1.04/sensor). This simple LED-photodetector pair is used to measure displacement with high resolution at low cost using a knife edge [30][31][32][40][41][42][43] to partially block the light beam and, therefore, change the light intensity on the detector. The sensor has the added benefit of a compact footprint and fast response time (10 µs) without the need for an additional amplifier.…”

Section: Introductionmentioning

confidence: 99%

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Stability Evaluation for a Damped, Constrained-Motion Cutting Force Dynamometer

Gomez¹,

Schmitz

2022

JMMP

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This paper describes the dynamic stability evaluation of a constrained-motion dynamometer (CMD) with passive damping. The CMD’s flexure-based design offers an alternative to traditional piezoelectric cutting force dynamometers, which can exhibit adverse effects of the complex structural dynamics on the measurement accuracy. In contrast, the CMD system’s structural dynamics are nominally single degree of freedom and are conveniently altered by material selection, flexure element geometry, and element arrangement. In this research, a passive damping approach is applied to increase the viscous damping ratio and, subsequently, the stability limit. Cutting tests were completed and the in situ CMD displacement and velocity signals were sampled at the spindle rotating frequency. The periodic sampling approach was used to determine if the milling response was synchronous with the spindle rotation (stable) or not (chatter) by constructing Poincaré maps for both experiment and prediction (time-domain simulation). It was found that the viscous damping coefficient was increased by 130% and the critical stability limit was increased from 4.3 mm (no damping) to 15.4 mm (with damping).

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Stability Evaluation for a Damped, Constrained-Motion Cutting Force Dynamometer

Gomez¹,

Schmitz

2022

JMMP

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“…The knife-edge sensing techniques for dimensional measurement applications have been recently introduced [14][15][16][17]. In particular, Lee proposed a new linear displacement sensing method utilizing knife-edge diffraction (KED) [16,17]. An electromagnetic (EM) wave incident on the knife-edge gives rise to two waves, a transmitted wave and an edge-diffracted wave.…”

Section: Measurement Principlementioning

confidence: 99%

A simple optical system for miniature spindle runout monitoring

2017

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We proposed a novel optical technique to monitor miniature spindle runout in a simple manner. Miniature spindles are commonly used in many machining applications, for example: micro-milling and micro-grinding. However, the capacitive sensors (CS) or eddy current sensors typically used for spindle runout measurements cannot be used for miniature spindle systems. This is due to the nonlinearity of the charge between a curved surface and a flat plate (sensing area) and a curved surface (measuring target area) and the effective sensing area being larger than the measuring target area. The proposed sensor utilizes curved-edge diffraction (CED), which uses the effect of the cylindrical surface curvature on the diffraction phenomenon in the transition regions adjacent to shadow, transmission, and reflection boundaries. The laser beam is incident to the spindle shaft edges along the Y and Z axes, four photodetectors then collect the total fields produced by the interference created by the waves due to CED around the spindle shaft edges. Two CS were used as a baseline comparison with the proposed sensor's performance. A spindle with a shaft diameter of ϕ 5.0 mm (same as CS effective sensing area) was selected to compare the results of the curved-edge sensor (CES) with the results of the CS. The spindle runout was measured and the following results were found: CES-CS calibration nonlinearity (Z 0.35% and Y 0.40%) and resolution (Z 20.1 nm and Y 26.0 nm for CS and Z 20.3 nm and Y 15.9 nm for CES). The fundamental sensing limit of CES was estimated to be: Z 0.52 nm Hz / and Y 0.41 nm Hz / for a working range of approximately 100 µm, respectively.

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“…10 and provide more than a ±1.0mm range. It was fabricated by using a stereolithography process [17,28]. From the open-loop testing, the XY nanopositioning system was characterized: natural frequency (55.6 Hz/52.6 Hz) and damping ratio (0.14/0.09) along the X and Y axes, respectively.…”

Section: -2 Xy Systemmentioning

confidence: 99%

“…However, their measuring ranges are limited to a few tens of micrometers even though they achieved nanometer resolution because the detector was assumed to be a point. Also, Lee proposed a single axis flexure mechanism with a knife-edge based displacement sensor [16,17,28]. The lensed photodetectors were used to increase the measuring range, but it is limited to 500 μm and the resolution was 50 nm because of the lens effect.…”

Section: Introductionmentioning

confidence: 99%

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

et al. 2017

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We analyzed the parameter effects of an optical knife-edge sensor (OKES) and the measurement uncertainty to achieve high linearity, long range, and high accuracy for nanopositioning stage applications. The OKES utilizes interference fringes produced from diffraction across the knife-edge. The total field at the detector was calculated from superposition of the incident field and the diffracted field at the knifeedge, and the edge diffraction effects on the sensor design parameters (distance between the knife-edge and detector, wavelength and beam diameter) were investigated by using a design of experiment (DOE), 3-Level L 9 matrix from the Taguchi Method. Multi-factor experiments were designed to determine the relationship between factors affecting the interferogram and the sensor linearity. It was found that a shorter knife edge-detector distance, shorter wavelength, and larger beam diameter show high signal-tonoise ratio for sensing linearity. The OKES was modeled by using the electromagnetic wave propagation principle, and it was experimentally verified by controlling the positioning of an XY nanopositioning stage by the OKES. The sensor noise level showed X 20.1 nm and Y 19.4 nm, and the fundamental sensing limits of the OKES were estimated to be X 0.19 nm/ and Y 0.23 nm/ for a ±1.0 mm working range. These results indicate that the OKES can be a good alternative to other precision metrology tools because of its large working range, positioning accuracy, resolution, linearity, and bandwidth, as well as its compact size and low cost.

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Positioning control effectiveness of optical knife edge displacement sensor-embedded monolithic precision stage

Cited by 24 publications

References 26 publications

Stability Evaluation for a Damped, Constrained-Motion Cutting Force Dynamometer

Stability Evaluation for a Damped, Constrained-Motion Cutting Force Dynamometer

A simple optical system for miniature spindle runout monitoring

Investigation of optical knife edge sensor for low-cost, large-range and dual-axis nanopositioning stages

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