Porous silicon fabrication on N-type Si (111) electrochemical anodization technique with HF:methanol solution

Syahidi, I.; Prayogo, E.; Pratama, B.; Triyana, Kuwat; Khairurrijal, K.; Susanto, Heru; Suryana, Risa

doi:10.1016/j.matpr.2021.02.833

Cited by 2 publications

(2 citation statements)

References 8 publications

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“…Furthermore, the optical properties of PCs can be controlled by the parameters of the anodizing process, including types and the concentration of electrolyte, applied potential, current density, temperature, anodizing time, etc [18]. Porous 1D PCs are frequently produced by anodization of silicon (porous silicon, pSi) [19,20] or titanium (titanium dioxide, TiO 2 ) [21,22]. However, a necessity of using aggressive electrolytes, such as hydrofluoric acid (HF) is disadvantageous in the production of those materials.…”

Section: Introductionmentioning

confidence: 99%

Designing porous photonic crystals for MIR spectral region—a deeper insight into the anodic alumina layer thickness versus charge density relation

2023

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The mid-infrared region (MIR) is crucial for many applications in security and industry, in chemical and biomolecular sensing, since it contains strong characteristic vibrational transitions of many important molecules and gases (e.g., CO2, CH4, CO). Despite its great potential, the optical systems operating in this spectral domain are still under development. The situation is caused mainly by the lack of inexpensive and adequate optical materials which show no absorption in the MIR. In this work, we present an easy and affordable way to develop 1D photonic crystals (PCs) based on porous anodic alumina (PAA) for MIR region. The porous PCs were produced by the pulse anodization of aluminum using charge-controlled mode. The first order photonic stopbands (λ1) were located within ca. 3.5 - 6.5 µm. Annealing of the material at 1100 °C for an hour has allowed to recover the wavelength range from around 5.8 to 7.5 µm owing to the decomposition of the absorption centers (oxalate anions) present in the anodic oxide framework while maintaining the PC structural stability. The spectral position and the shape of the resonances were regulated by the charge passing under high (UH) and low (UL) voltage pulses, porosity of the corresponding dH and dL segments, and duration of the process (ttot). The thickness of the dH and dL layers was proportional to the charge passing under respective pulses, with the proportionality coefficient increasing with the applied voltage. Despite the constant charge (2500 mC/cm2) applied during the anodization, the thickness of anodic alumina (d) increased with applied voltage (10-60 V) and anodizing temperature (5-30 °C). This behavior was ascribed to the different kinetics of the anodic alumina formation prompted by the variable electrochemical conditions. The photonic material can be used in portable nondispersive gas sensors as an enhancement layer operating up to around 9 µm.

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Section: Introductionmentioning

confidence: 99%

Designing porous photonic crystals for MIR spectral region—a deeper insight into the anodic alumina layer thickness versus charge density relation

2023

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“…Anodization is a commonly used name for electrochemical oxidation of metals [1][2][3], their alloys [4,5] and semiconductors [6][7][8] under either galvanostatic or potentiostatic conditions in a two-electrode setup since the oxidized material plays a role of an anode. Originally, the major application of anodic oxidation was corrosion protection of lightweight aluminum alloys [9,10].…”

Section: Introductionmentioning

confidence: 99%

Incorporation of Ions into Nanostructured Anodic Oxides—Mechanism and Functionalities

2021

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Anodic oxidation of metals leads to the formation of ordered nanoporous or nanotubular oxide layers that contribute to numerous existing and emerging applications. However, there are still numerous fundamental aspects of anodizing that have to be well understood and require deeper understanding. Anodization of metals is accompanied by the inevitable phenomenon of anion incorporation, which is discussed in detail in this review. Additionally, the influence of anion incorporation into anodic alumina and its impact on various properties is elaborated. The literature reports on the impact of the incorporated electrolyte anions on photoluminescence, galvanoluminescence and refractive index of anodic alumina are analyzed. Additionally, the influence of the type and amount of the incorporated anions on the chemical properties of anodic alumina, based on the literature data, was also shown to be important. The role of fluoride anions in d-electronic metal anodizing is shown to be important in the formation of nanostructured morphology. Additionally, the impact of incorporated anionic species, such as ruthenites, and their influence on anodic oxides formation, such as titania, reveals how the phenomenon of anion incorporation can be beneficial.

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Porous silicon fabrication on N-type Si (111) electrochemical anodization technique with HF:methanol solution

Cited by 2 publications

References 8 publications

Designing porous photonic crystals for MIR spectral region—a deeper insight into the anodic alumina layer thickness versus charge density relation

Designing porous photonic crystals for MIR spectral region—a deeper insight into the anodic alumina layer thickness versus charge density relation

Incorporation of Ions into Nanostructured Anodic Oxides—Mechanism and Functionalities

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