2002
DOI: 10.1149/1.1466935
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Porous GaP Multilayers Formed by Electrochemical Etching

Abstract: The properties of porous GaP, formed by anodic etching in H 2 SO 4 , are described. Pore size, pore density, and the interpore distance depend on the dopant density and the potential at which the sample is etched. In addition, it is shown that at high potential, the GaP passivates as a result of the formation of an oxide layer. These features allow us to grow multilayer structures of GaP with modulated porosity and/or oxide layers. The dissolution of oxide at the base of a porous layer can be used to produce f… Show more

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Cited by 58 publications
(50 citation statements)
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“…10 The electrochemical etching was done in an aqueous 0.5 M H 2 SO 4 solution. 9 From Table I, we observe that V max increases as the dopant density decreases. As for anodically etched Si, 11 the pore diameter, interpore distance, and porosity of GaP depend on the dopant density and on the applied potential.…”
mentioning
confidence: 86%
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“…10 The electrochemical etching was done in an aqueous 0.5 M H 2 SO 4 solution. 9 From Table I, we observe that V max increases as the dopant density decreases. As for anodically etched Si, 11 the pore diameter, interpore distance, and porosity of GaP depend on the dopant density and on the applied potential.…”
mentioning
confidence: 86%
“…Multilayers of low porosity GaP are easy to make. 9 Such multilayers could be used as efficient one-dimensional photonic crystals or Bragg reflectors. Besides photonic applications, porous GaP can be used for micromechanical devices and sieves for biomolecules in micro total analysis systems.…”
mentioning
confidence: 99%
“…4͑a͔͒. 17,18 After initial pitting of the surface, further etching proceeds in all directions radically away from the initial surface imperfection ͓Figs. 4͑b͒ and 4͑c͔͒.…”
Section: A Scanning Electron Microscopy Observationmentioning
confidence: 99%
“…3, 8 The current density increased initially and became constant after going through a maximum. 8 When the current reached its constant level the porous layer had a thickness of ϳ2 m. From then on the thickness of the porous layer increased at a constant rate of 0.47 and 0.62 m/ min for samples A and B, respectively.…”
mentioning
confidence: 95%
“…Porous multilayers in GaP, with alternating porosity, can be formed by etching with alternating potential. 8 In several recent articles diffusive light transport in porous GaP has been considered. Optimization of the etching process of GaP has yielded the strongest random-scattering material for visible light reported to date.…”
mentioning
confidence: 99%