2004
DOI: 10.4028/www.scientific.net/msf.445-446.254
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Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

Abstract: Para-positronium (p-Ps) and ortho-Ps (o-Ps) which are formed in the pores of materials are very sensitive probes to determine pore sizes and type of porosity in porous thin film materials. In addition to Positron Beam Analysis with Doppler Broadening a high resolution technique for measuring momentum distributions of the p-Ps is applied: 2D-ACAR combined with the intense positron beam facility present in Delft. Effusion of hot p-Ps was observed from highly porous low-k dielectric SiO 2 films. In silicon nanoc… Show more

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Cited by 3 publications
(4 citation statements)
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“…Also, from the reports of Van Veen et al, we find there is ample possibility of observing p-Ps component in the various silica gel samples. It is shown in the concerned reference 21 that in silica gel samples with smaller pore size there is considerable increase in shorter component intensities with temperature as there the volume of surface layer is considerably large compared to void volume.…”
Section: Discussionsupporting
confidence: 60%
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“…Also, from the reports of Van Veen et al, we find there is ample possibility of observing p-Ps component in the various silica gel samples. It is shown in the concerned reference 21 that in silica gel samples with smaller pore size there is considerable increase in shorter component intensities with temperature as there the volume of surface layer is considerably large compared to void volume.…”
Section: Discussionsupporting
confidence: 60%
“…If an unpaired electron (local paramagnetic center) exists (6) at the activated surface as a defect or the strained surface groups (Si-O • ), 22 created due to irradiation with about 10-15 µCi positron source under high vacuum (∼10 -6 Torr), a lifetime quenching effect can be observed. 21,23 Also, from the reports of Van Veen et al, 8 we find there is ample possibility of observing p-Ps component in the various silica gel samples. It is shown in the concerned reference 21 that in silica gel samples with smaller pore size there is considerable increase in shorter component intensities with temperature as there the volume of surface layer is considerably large compared to void volume.…”
Section: Discussionmentioning
confidence: 82%
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“…Surface interaction also could be responsible for quenching of the lifetime or inhibition/enhancement of intensities, 11,26 and in a different context, the effusion of parapositronium has been shown from the internal surface of pores in silica which is ultimately degraded in energy due to collision interactions with the atoms of the pore. 29 This in fact stimulates further enhanced activities on porosity and organized pore structures in siliceous materials.…”
Section: Comparison Of the Methods For Determining The Pore Size: mentioning
confidence: 99%