2018
DOI: 10.1016/j.ijleo.2018.08.019
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Porosity and roughness determination of porous silicon thin films by genetic algorithms

Abstract: The problem of determining the porous silicon (PSi) optical constants, thickness, porosity, and surface quality using just reflectance data is board employing evolutionary algorithms. The reflectance measurements were carried out of PSi films over crystalline silicon (c-Si) substrate, and the fitting procedure was done by using a genetic algorithm. The PSi is treated as a mixture of c-Si and air. Therefore, its effective optical constants can be correlated with the porosity trough effective medium approximatio… Show more

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Cited by 22 publications
(20 citation statements)
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“…For this reason, we decided to use the Looyenga effective medium approximation (LEMA) to describe the effective dielectric function in the theoretical model of the optical response. The LEMA formula does not consider a regular geometry of the incrustations and is defined by equation [21]…”
Section: Resultsmentioning
confidence: 99%
“…For this reason, we decided to use the Looyenga effective medium approximation (LEMA) to describe the effective dielectric function in the theoretical model of the optical response. The LEMA formula does not consider a regular geometry of the incrustations and is defined by equation [21]…”
Section: Resultsmentioning
confidence: 99%
“…1 shows, the increase of current density rises the etching rate and film porosity producing a reduction of the PA cycle. After that, reflectance spectra were measured and fitted by using genetic algorithms (GA) reported by Ramirez-Gutierrez 5153 to determine simultaneously the effective porosity (Fig. 3b), interface roughness 54 , and thickness using the Transfer Matrix Method (TMM).
Figure 3Calibration series parameters.
…”
Section: Resultsmentioning
confidence: 99%
“…In the porous silicon a gradual change of the refractive index is observed. Another important factor influencing the calculation of layer thickness is roughness at the interfaces air/b-Si and b-Si/Si [16]. For these reasons, the thickness calculation of b-Si layers and optical constants (refractive index, extinction coefficient) determination requires a different approach.…”
Section: Determination Of Thickness Of B-si Layer From the Spectral Rmentioning
confidence: 99%
“…In construction of the spectral reflectance model an effective medium approximations (EMA) are usually used. Frequently used EMA theories involve Maxwell-Garnett, Bruggeman, Lorentz-Lorentz, Drude and Looyenga theories [16,[23][24][25][26][27]. Spectral reflectances of b-Si layers were modelled in the SCOUT software by using Looyenga EMA approach suitable for porous structures, [16].…”
Section: Determination Of Thickness Of B-si Layer From the Spectral Rmentioning
confidence: 99%