1989
DOI: 10.1149/1.2096678
|View full text |Cite
|
Sign up to set email alerts
|

Porosity and Microstructure of Thin Films of Al2 O 3 Formed from an Alumina Sol

Abstract: Thin films of porous alumina were formed from an alumina sol which was cured at 500~ in either air or oxygen. We have determined, from a simple RBS marker experiment, that alumina films made from this sol have a volume porosity of about 50%, which is substantially different from bulk structures formed from this material. Ellipsometric measurements were also carried out to determine the porosity of these films. Our analysis shows an excellent agreement between the two measurements. No change in film porosity wa… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Year Published

1991
1991
2023
2023

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
references
References 7 publications
0
0
0
Order By: Relevance