SPIE Future Sensing Technologies 2023 2023
DOI: 10.1117/12.2644836
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Polymer waveguide phase modulators integrated with silicon nitride waveguides for optical phased array LiDAR beam scanner

Abstract: Polymer waveguide optical phased array (OPA) beam scanners can achieve stable beam steering with low driving power owing to the large TO coefficient and low thermal conductivity of the polymer material. However, polymeric OPAs with low refractive index contrast exhibit narrow field-of-view (FOV) because of the wide pitch of the output waveguide channels compared to their counterparts of Si and silicon nitride (SiN) photonic integrated circuit platforms. Meanwhile, SiN waveguides offer stronger mode confinement… Show more

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