2006
DOI: 10.1109/jstqe.2005.862945
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Polymer microring resonators for biochemical sensing applications

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Cited by 379 publications
(58 citation statements)
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“…Substrates and masters were heated to 130 °C and pressurized to 120 psi to precondition the polymer, followed by embossing at 140 °C and 500 psi for four minutes. In agreement with the previous literature, because of the aspect ratio between the waveguide structures and the thin polymer film, for many patterns higher pressure was needed than when imprinting other features [12,13]. Substrates were cleaved by marking the edge of the wafer onto which the polymer waveguides had been embossed using a diamond scribe, and carefully snapping the wafer along one of its crystal planes.…”
Section: Methodssupporting
confidence: 65%
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“…Substrates and masters were heated to 130 °C and pressurized to 120 psi to precondition the polymer, followed by embossing at 140 °C and 500 psi for four minutes. In agreement with the previous literature, because of the aspect ratio between the waveguide structures and the thin polymer film, for many patterns higher pressure was needed than when imprinting other features [12,13]. Substrates were cleaved by marking the edge of the wafer onto which the polymer waveguides had been embossed using a diamond scribe, and carefully snapping the wafer along one of its crystal planes.…”
Section: Methodssupporting
confidence: 65%
“…There are a number of well developed techniques that permit direct label-free detection of bound target biomolecules [2], including optical [35], electrical [6], and acoustic sensors [7]. Within the broader class of label-free biosensors, optically resonant devices are particularly promising due to their ability to concentrate electromagnetic energy into small mode volumes, their capacity for multiplexed detections, and their ability to operate in aqueous environments [813]. A number of different architectures have been investigated in the development of optically resonant biosensors, including photonic crystals [5, 14], microtoroids [15], and microring/microracetracks [16,17].…”
Section: Introductionmentioning
confidence: 99%
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“…Among the various kinds of microresonators 9,10 made from semiconducting or dielectric materials those comprising rotational symmetry, such as spheres, 11 cylinders, 12 rings, 13 or toroids, 2,14 have attracted a lot of interest because they can be fabricated from a single material without any need for optical coatings. In such resonators, light is guided by total internal reflection ͑TIR͒, which implies that the traveling ray has to impinge onto the resonator/ambient interface with its refractive index contrast n = n res / n amb at an angle beyond the critical angle, ␣ crit = arcsin͑1 / n͒, for TIR.…”
Section: -8mentioning
confidence: 99%
“…[6][7][8] The sensing area is relatively smaller than those devices based on surface plasma resonance and diffractive grating. The microring resonator configuration consists of a ring waveguide sandwiched by two straight waveguides.…”
Section: Introductionmentioning
confidence: 99%