2022
DOI: 10.1016/j.ceramint.2021.12.246
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Polymer derived SiBCN(O) ceramics with tunable element content

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Cited by 14 publications
(6 citation statements)
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“…[ 62 ] In another study, amorphous SiBCN(O) ceramics were made from pyrolysis of crosslinked polyborosilazanes. [ 63 ] SiC/B 4 C composite was made from poly(carborane)(silicon‐acetylene) after 1600 °C thermal treatment. [ 64 ] The formed SiC/B 4 C phases were highly crystalline with sizes at <100 nm.…”
Section: Carbide Materialsmentioning
confidence: 99%
“…[ 62 ] In another study, amorphous SiBCN(O) ceramics were made from pyrolysis of crosslinked polyborosilazanes. [ 63 ] SiC/B 4 C composite was made from poly(carborane)(silicon‐acetylene) after 1600 °C thermal treatment. [ 64 ] The formed SiC/B 4 C phases were highly crystalline with sizes at <100 nm.…”
Section: Carbide Materialsmentioning
confidence: 99%
“…The tunable structures and compositions of preceramic polymers enable the fabrication of complex ceramics, such as SiO(N)C, 45 SiHfC, 46,47 SiTaC, 48 SiBCO, 49 SiAlCO, [50][51][52] SiAlCN, [53][54][55] SiBCN, [56][57][58][59] SiHf TaC, 60 SiHfCNO, 61,62 SiHfBCN, [63][64][65] SiZrBCN, 66 which cannot be obtained easily by traditional ceramic processing strategies. As mentioned earlier, preceramic polymers can be formed by conventional polymer-forming techniques.…”
Section: Preparation Of Pdcsmentioning
confidence: 99%
“…Among these, the synthesis of preceramic polymers is considered to be the key process, because the chemical and phase compositions as well as the microstructures of PDCs are highly dependent on the molecular structure of the preceramic polymer. The tunable structures and compositions of preceramic polymers enable the fabrication of complex ceramics, such as SiO(N)C, 45 SiHfC, 46,47 SiTaC, 48 SiBCO, 49 SiAlCO, 50–52 SiAlCN, 53–55 SiBCN, 56–59 SiHfTaC, 60 SiHfCNO, 61,62 SiHfBCN, 63–65 SiZrBCN, 66 which cannot be obtained easily by traditional ceramic processing strategies. As mentioned earlier, preceramic polymers can be formed by conventional polymer‐forming techniques.…”
Section: Polymer‐derived Ceramics (Pdcs)mentioning
confidence: 99%
“…[13][14][15] Such techniques may not permit swift tunability of the microstructure and dimensions of the ceramics, thus deeming the synthesis process inefficient. [16][17][18][19] Other common approaches for synthesis of binary SiC and ternary SiOC systems include chemical vapor deposition and spark plasma sintering. The former is typically preferred for the production of thin films in the semiconductor industry.…”
Section: Introductionmentioning
confidence: 99%
“…By convention, ceramic systems are produced by high temperature sintering of powder mixtures 13–15 . Such techniques may not permit swift tunability of the microstructure and dimensions of the ceramics, thus deeming the synthesis process inefficient 16–19 . Other common approaches for synthesis of binary SiC and ternary SiOC systems include chemical vapor deposition and spark plasma sintering.…”
Section: Introductionmentioning
confidence: 99%