Polymer-Assisted Pressure Sensor with Piezoresistive Suspended Graphene and Its Temperature Characteristics

Lin, Xin; Liu, Ying; Zhang, Yong; Yang, Peng; Cheng, Xianzhe; Qiu, Jing; Liu, Guanjun

doi:10.1142/s1793292019501303

Cited by 8 publications

(5 citation statements)

References 30 publications

(33 reference statements)

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Lin et al combined PMMA with graphene to achieve a sensitivity of 2.87 × 10 −5 kPa −1 sensitivity. [228] Liu et al prepared a pressure sensor with sensitivity of approximately 7.42 × 10 −5 kPa −1 . [229] The sensitivity of this device on the unit area is approximately the same order compared with suspended monolayer graphene.…”

Section: Strain-based Pressure Sensorsmentioning

confidence: 99%

See 1 more Smart Citation

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

Acoustic devices play an increasingly important role in modern society for information technology and intelligent systems, and recently significant progress has been made in the development of communication, sensing, and energy transduction applications. However, conventional material systems, such as polymers, metals and silicon, show limitations to fulfill the evolving requirements for high‐performance acoustic devices of small size, low power consumption, and multifunctional capabilities. 2D materials hold the promise in overcoming the development bottleneck of acoustic devices aforementioned, given their atomic‐thin thickness, extensive surface area, superior physical properties, and remarkable layer‐stacking tunability. By suspending the 2D materials, mechanical and thermal disruption from substrate will be eliminated, which will enable the development of new classes of acoustic devices with unprecedented sensitivity and accuracy. In this review, the recent progress of acoustic devices based on suspended 2D materials and their composites, especially applications in the audio frequency, static pressure, and ultrasonic frequency range, is briefly summarized, emphasizing the advantageous properties of suspended 2D materials and related outstanding device performance. Together with the development of 2D membrane synthesis, transfer, as well as microelectromechanical fabrication process, suspended 2D materials will shed light on the next‐generation high‐performance acoustic devices.

show abstract

Section: Strain-based Pressure Sensorsmentioning

confidence: 99%

“…combined PMMA with graphene to achieve a sensitivity of 2.87 × 10 −5 kPa −1 sensitivity. [ 228 ] Liu et al. prepared a pressure sensor with sensitivity of approximately 7.42 × 10 −5 kPa −1 .…”

Section: Static Pressure Sensorsmentioning

confidence: 99%

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Wan,

Liu,

Zheng

et al. 2023

Adv Funct Materials

View full text Add to dashboard Cite

show abstract

“…A great amount of effort has been exerted toward realizing the application of graphene in electronic devices, such as in flexible touch screens [ 11 ], high-frequency transistors [ 12 ], and high-sensitivity sensors [ 13 , 14 , 15 , 16 ]. Studies on graphene microelectromechanical system (MEMS) pressure sensors have attracted a certain degree of attention [ 17 , 18 , 19 , 20 , 21 , 22 ], as this would be advantageous for the miniaturization and batch production of sensors. Such sensors mainly focus on the structural study of suspended graphene and supporting graphene and are manufactured using traditional technology.…”

Section: Introductionmentioning

confidence: 99%

Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere

Liu

Wei

Wang

2022

Sensors

View full text Add to dashboard Cite

The high demand for pressure devices with miniaturization and a wide bearing range has encouraged researchers to explore new high-performance sensors from different approaches. In this study, a sensitive element based on graphene in-plane compression properties for realizing pressure sensing is experimentally prepared using microelectromechanical systems (MEMS) fabrication technology; it consists of a 50 µm thick, 1400 µm wide square multilayer component membrane and a graphene monolayer with a meander pattern. The prepared sample is extensively characterized and analyzed by using various techniques, including atomic force microscopy, Raman spectroscopy, infrared spectroscopy, X-ray photoelectron spectroscopy, COMSOL finite element method, and density functional theory. The sensing performance of the new pressure sensor based on the sensitive element are obtained by theoretical analysis for electromechanical measurements of the sensitive element before and after low-temperature annealing in atmosphere. Results demonstrate that atmospheric annealing at 300 °C enhances the pressure sensing sensitivity by 4 times compared to pristine graphene without annealing, which benefits from the desorption of hydroxyl groups on the graphene surface during annealing. The sensitivity is comparable and even better than that of previous sensors based on graphene in-plane properties. Our results provide new insights into realizing high-performance MEMS devices based on 2D sensitive materials.

show abstract

“…As a common physical quantity, pressure has been widely used in many areas, such as industrial control, meteorological monitoring, oil exploration and aerospace investigation [ 1 , 2 , 3 , 4 ]. Compared with other pressure sensors, resonant pressure sensors are featured with high performances in linearity, resolution, stability and accuracy.…”

Section: Introductionmentioning

confidence: 99%

A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

Xiang

Yan

et al. 2020

Micromachines

View full text Add to dashboard Cite

This paper presents the analysis and characterization of a resonant pressure microsensor, which employs a temperature compensation method based on differential outputs and a temperature sensor. Leveraging a silicon-on-insulator (SOI) wafer, this microsensor mainly consists of a pressure-sensitive diagram and two resonant beams (electromagnetic driving and electromagnetic induction) to produce a differential output. The resonators were vacuum packaged with a silicon-on-glass (SOG) cap using anodic bonding and the wire interconnection was realized by sputtering an Au film on highly topographic surfaces using a hard mask. After the fabrication of the resonant pressure microsensor, systematic experiments demonstrated that the pressure sensitivity of the presented microsensor was about 0.33 kPa/Hz. Utilizing the differential frequency of the two resonators and the signal from a temperature sensor to replace the two-frequency signals by polynomial fitting, the temperature compensation method based on differential outputs aims to increase the surface fitting accuracy of these microsensors which have turnover points. Employing the proposed compensation approach in this study, the errors were less than 0.02% FS of the full pressure scale (a temperature range of −40 to 85 °C and a pressure range of 200 kPa to 2000 kPa).

show abstract

Polymer-Assisted Pressure Sensor with Piezoresistive Suspended Graphene and Its Temperature Characteristics

Cited by 8 publications

References 30 publications

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

A Review of Acoustic Devices Based on Suspended 2D Materials and Their Composites

Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere

A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor

Contact Info

Product

Resources

About