2022
DOI: 10.1108/mi-03-2022-0038
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Polyimide substrate textured by copper-seeding technique for enhanced light absorption in flexible black silicon

Abstract: Purpose This paper aims to present investigation on textured polyimide (PI) substrate for enhanced light absorption in flexible black silicon (bSi). Design/methodology/approach Flexible bSi with thickness of 60 µm is used in this work. To texture the PI substrate, copper-seeding technique is used. A copper (Cu) layer with a thickness of 100 nm is deposited on PI substrate by sputtering. The substrate is then annealed at 400°C in air ambient for different durations of 60, 90 and 120 min. Findings With 90 mi… Show more

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References 29 publications
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