Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure

Gerhard, Christoph; Weihs, Tobias; Luca, A.; Wieneke, Stephan; Viöl, Wolfgang

doi:10.2971/jeos.2013.13081

Cited by 21 publications

(14 citation statements)

References 18 publications

(19 reference statements)

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“…For plasma post-processing, a plasma source as described in more detail in previous work [38][39][40] was used. This plasma source basically consists of a conical rotation-symmetric high-voltage copper electrode embedded in a plastic housing made of polyoxymethylene (POM).…”

Section: Plasma Post-processingmentioning

confidence: 99%

“…In contrast to classical arc discharges, burn-off of the electrode material is moreover reduced or even inhibited, avoiding the deposition of electrode material on the sample surface. In the present work, the plasma treatment duration was 60 s. The impact of such short-term direct DBD plasma post-processing was investigated since it was observed in previous work that applying this type of plasma for merely one minute allows considerable smoothing of optical media [39,40] as well as surface cleaning and an accompanying increase in LIDT of sapphire substrates [16].…”

Section: Plasma Post-processingmentioning

confidence: 99%

“…This mechanism could also play a role in the present case. Even though the plasma fluence is quite low, i.e., F plasma = 0.54 J/cm 2 [39,40], the plasma used in this work is ignited directly on the glass surface and thus provides a considerable amount of ultraviolet irradiation which might induce desorption. Another possible underlying mechanism, the emission of electrons or ions from the surface and the resulting alteration of electrical forces within the surface which bind the contaminants, was reported by Logothetis and Hartman [54].…”

Section: Impact Of Plasma Post-processingmentioning

confidence: 99%

See 2 more Smart Citations

Impact of the Polishing Suspension Concentration on Laser Damage of Classically Manufactured and Plasma Post-Processed Zinc Crown Glass Surfaces

Gerhard

Stappenbeck²

2018

Applied Sciences

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Featured Application: The specific application of the presented work is the increase in laser-induced damage threshold of polished components made of optical glasses such as lenses, prisms, and protection windows.Abstract: The laser-induced damage threshold of optics is an issue of essential importance in high-power laser applications. However, the complex and partially interacting mechanisms as well as the underlying reasons for laser damage of glass surfaces are not yet fully understood. The aim of the present work is to contribute to a better understanding of such damage mechanisms by providing original results on the impact of classical glass surface machining on the laser-induced damage threshold. For this purpose, glass samples were prepared with well-defined process conditions in terms of the used lapping and polishing agents and suspensions. Further, the samples were post-processed by atmospheric pressure plasma for precision cleaning. The laser-induced damage threshold and surface contamination by residues from the manufacturing process were determined before and after plasma post-processing. It is shown that the polishing suspension concentration has a certain impact on the laser-induced damage threshold and surface contamination by residues from used working materials. The highest damage threshold of 15.2 J/cm 2 is found for the lowest surface contamination by carbon which occurs in the case of the highest polishing suspension concentration. After plasma treatment for merely 60 s, this value was increased to 20.3 J/cm 2 due to the removal of surface-adherent carbon. The results thus imply that the laser-induced damage threshold can notably be increased by first choosing appropriate process parameters during classical manufacturing and second plasma post-processing for surface finishing.

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Section: Plasma Post-processingmentioning

confidence: 99%

Section: Plasma Post-processingmentioning

confidence: 99%

Section: Impact Of Plasma Post-processingmentioning

confidence: 99%

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Impact of the Polishing Suspension Concentration on Laser Damage of Classically Manufactured and Plasma Post-Processed Zinc Crown Glass Surfaces

Gerhard

Stappenbeck²

2018

Applied Sciences

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“…Such impact of DBD-plasmas on the roughness of glass surfaces was already reported in previous work. It was shown that, depending on the particular plasma discharge type and the used process gas, both surface smoothing [29] and surface wrinkling [17] can occur. In the present case, the average area roughness S a as well as the root mean square area roughness S q were reduced as a result of the plasma treatment as shown in Figure 4.…”

Section: Plasma Pre-treatmentmentioning

confidence: 99%

Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy

et al. 2014

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Abstract:In this paper, we present sequential atmospheric pressure plasma-assisted laser ablation of photovoltaic cover glass. First, glass samples were plasma pre-treated using a hydrogenous plasma process gas in order to accomplish a modification of the near-surface glass network by a chemical reduction and the implantation of hydrogen. As a result, the transmission at a wavelength of 355 nm was reduced by approximately 2% after plasma treatment duration of 60 min. Further, the surface polarity was increased by approximately 78%, indicating an increase of the near-surface index of refraction. Subsequently to the plasma pre-treatment, the samples were laser ablated applying the above-mentioned laser wavelength of a Nd:YAG nanosecond laser. Compared to untreated samples, a significant decrease of the form error by 45% without any mentionable change in the ablation rate was obtained in the case of pre-treated samples. For comparison, the results and findings are discussed with respect to previous work, where the presented plasma-assisted ablation procedure was applied to optical glasses.

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“…A lot of models to describe the kinetics of polishing process have been proposed up to now [31][32][33][34]. In this article we introduce a new possibility to use RSA technique for the modeling of plasma polishing kinetics.…”

Section: Introductionmentioning

confidence: 99%

Applicability of random sequential adsorption algorithm for simulation of surface plasma polishing kinetics

Minárik¹,

Vaňa²

2015

Applied Surface Science

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Polishing of optical media by dielectric barrier discharge inert gas plasma at atmospheric pressure

Cited by 21 publications

References 18 publications

Impact of the Polishing Suspension Concentration on Laser Damage of Classically Manufactured and Plasma Post-Processed Zinc Crown Glass Surfaces

Impact of the Polishing Suspension Concentration on Laser Damage of Classically Manufactured and Plasma Post-Processed Zinc Crown Glass Surfaces

Sequential Atmospheric Pressure Plasma-Assisted Laser Ablation of Photovoltaic Cover Glass for Improved Contour Accuracy

Applicability of random sequential adsorption algorithm for simulation of surface plasma polishing kinetics

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