2011
DOI: 10.1017/s143192761101213x
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Point Defect Clusters and Dislocations in FIB Irradiated Nanocrystalline Aluminum Films: An Electron Tomography and Aberration-Corrected High-Resolution ADF-STEM Study

Abstract: Focused ion beam (FIB) induced damage in nanocrystalline Al thin films has been characterized using advanced transmission electron microscopy techniques. Electron tomography was used to analyze the three-dimensional distribution of point defect clusters induced by FIB milling, as well as their interaction with preexisting dislocations generated by internal stresses in the Al films. The atomic structure of interstitial Frank loops induced by irradiation, as well as the core structure of Frank dislocations, has … Show more

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Cited by 33 publications
(23 citation statements)
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“…ADF-STEM imaging was performed using an ADF collection inner semi-angle optimized to allow both diffraction and massthickness contrast to contribute to the image formation in order to make defects easily visible. 19 The close packing of the diamond grains can be seen in the plan-view image in Fig. 1a.…”
Section: 12mentioning
confidence: 88%
“…ADF-STEM imaging was performed using an ADF collection inner semi-angle optimized to allow both diffraction and massthickness contrast to contribute to the image formation in order to make defects easily visible. 19 The close packing of the diamond grains can be seen in the plan-view image in Fig. 1a.…”
Section: 12mentioning
confidence: 88%
“…Recent experiments confirmed formation of a dislocation network [16] in Au nanoparticles and dislocation loops in the Al thin film [17] at fluences typical for focused ion beam (FIB) milling. TEM observation of as-fabricated Al nanopillars revealed the formation of nm-sized dislocation loops [18].…”
Section: Introductionmentioning
confidence: 93%
“…TEM observation of as-fabricated Al nanopillars revealed the formation of nm-sized dislocation loops [18]. According to [17], the dislocation loops formed by a high energy Ga ? ion impact in Al at room temperature are most likely of the interstitial type.…”
Section: Introductionmentioning
confidence: 99%
“…The loading axis was along the ½111 crystallographic direction of the face-centered cubic (FCC) Al crystal, and the beam direction was close to the [110] zone axis, as confirmed by the selected area electron diffraction pattern. Two types of dislocations were identified in the as-fabricated aluminum crystal: dislocation lines inherited from the bulk crystal or generated during the fabrication process and Frank dislocation loops introduced by ion beam irradiation during FIB cutting, which usually occur in the regions close to the free surface (19). The initial densities of dislocation lines and dislocation loops in the as-fabricated crystal specimen were measured to be ∼2.0 × 10 13 m -2 and 4.6 × 10 13 m -2 , respectively (Fig.…”
Section: Significancementioning
confidence: 99%