Pneumatic non-contact roughness assessment of moving surfaces

Grandy, David; Koshy, Philip; Klocke, Fritz

doi:10.1016/j.cirp.2009.03.121

Cited by 24 publications

(8 citation statements)

References 13 publications

(14 reference statements)

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“…The tip-to-sample distance in EFM is on the order of 100 nm during the scanning, which is more than ten times larger than that in a scanning tunnelling microscope (STM) [236] [82] and is large enough to avoid collision of the tip with the sample surface. In addition, pneumatic sensors [83] and ultrasonic sensors [213] are other types of noncontact sensors for on-machine surface metrology.…”

Section: Noncontact-type Probesmentioning

confidence: 99%

On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

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Section: Noncontact-type Probesmentioning

confidence: 99%

On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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“…Przykładowo, omawiając pneumatyczną metodę pomiaru chropowatości (rys. 1) autorzy pomijają analizę błędów dynamicznych zaznaczając, że ich wartość została określona na podstawie geometrii czujnika [18]. [18].…”

Section: Określanie Właściwości Dynamicznych Czujników Pneumatycznychunclassified

Variations of the time constant within the measuring range of an air gauge

Rucki¹

2015

Mechanik

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ZMIENNOŚĆ STAŁEJ CZASOWEJ W CZASIE POMIARU CZUJNIKIEM PNEUMATYCZNYMPomiar bezstykowy czujnikami pneumatycznymi wciąż znajduje zastosowanie w przemyśle, głównie w ukła-dach kontroli czynnej. W tych warunkach bardzo istotne są ich właściwości dynamiczne, zależne od geometrii elementów przepływowych oraz od aktualnego ciśnienia w komorze pomiarowej. Badania wykazały, że przy mniejszych ciśnieniach odpowiadających szerszym szczelinom pomiarowym, stała czasowa wzrasta, w niektó-rych przypadkach nawet o 100%. Nieuwzględnienie tego faktu może doprowadzić do zwiększenia błędów pomiaru właśnie w końcowej fazie obróbki. VARIATIONS OF THE TIME CONSTANT WITHIN THE MEASURING RANGE OF AN AIR GAUGENon-contact measurement with the air gauges still takes place in industry, mainly in the in-process inspection. In such work conditions, their dynamic characteristics shaped by geometry of the air gauge and dependent on the actual measuring pressure become of great importance. The investigations proved that when the pressure in the chamber is lower, which corresponds with larger measured slots, the time constant increases, sometimes even up to 100%. If this phenomenon is neglected, the final stage of the machining could bear much larger error than expected.

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“…Some research has aimed tried to reduce the probing force to several mN [4,5], but high measurable depth and high precision cannot be achieved at the same time. Noncontact probing methods are promising solutions to this challenge [6][7][8]. Of all the noncontact probing methods, optical methods are more promising to obtain higher resolution and precision [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Ultraprecision Diameter Measurement of Small Holes with Large Depth-To-Diameter Ratios Based on Spherical Scattering Electrical-Field Probing

Bian

Cui

et al. 2019

Applied Sciences

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In order to solve the difficulty of precision measurement of small hole diameters with large depth-to-diameter ratios, a new measurement method based on spherical scattering electrical-field probing (SSEP) was developed. A spherical scattering electrical field with identical sensing characteristics in arbitrary spatial directions was formed to convert the micro gap between the probing-ball and the part being measured into an electrical signal. 3D non-contact probing, nanometer resolution, and approximate point probing—which are key properties for high measurement precision and large measurable depth-to-diameter ratios—were achieved. A specially designed hole diameter measuring machine (HDMM) was developed, and key techniques, including laser interferometry for macro displacement measurement of the probe, multi-degree-of-freedom adjustment of hole attitude, and measurement process planning, are described. Experiments were carried out using the HDMM and a probing sensor with a ϕ3-mm probing ball and a 150-mm-long stylus to verify the performance of the probing sensor and the measuring machine. The experimental results indicate that the resolution of the probing sensor was as small as 1 nm, and the expanded uncertainty of measurement result was 0.2 μm (k = 2) when a ϕ20-mm ring gauge standard was measured.

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Pneumatic non-contact roughness assessment of moving surfaces

Cited by 24 publications

References 13 publications

On-machine and in-process surface metrology for precision manufacturing

On-machine and in-process surface metrology for precision manufacturing

Variations of the time constant within the measuring range of an air gauge

Ultraprecision Diameter Measurement of Small Holes with Large Depth-To-Diameter Ratios Based on Spherical Scattering Electrical-Field Probing

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