2012
DOI: 10.1166/sam.2012.1303
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PLD Deposited ZnO Films on Different Substrates and Oxygen Pressure: A Study of Surface Morphology and Optical Properties

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Cited by 14 publications
(4 citation statements)
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“…As previously stated, the target is usually irradiated at an angle between 45 and 60 • . Common substrate materials usually used in PLD are yttrium stabilized zirconium oxide (YSZ), strontium titanate (SrTiO 3 ) [58], magnesium oxide (MgO) and sapphire (Al 2 O 3 ) [59,60]. Some semiconductors such as silicon (Si), gallium oxide (β-Ga 2 O 3 ) [61], fused silica (SiO 2 ) [62], zinc oxide (ZnO) and gallium arsenide (GaAs) [60] have also been used as substrates.…”
Section: Methodsmentioning
confidence: 99%
“…As previously stated, the target is usually irradiated at an angle between 45 and 60 • . Common substrate materials usually used in PLD are yttrium stabilized zirconium oxide (YSZ), strontium titanate (SrTiO 3 ) [58], magnesium oxide (MgO) and sapphire (Al 2 O 3 ) [59,60]. Some semiconductors such as silicon (Si), gallium oxide (β-Ga 2 O 3 ) [61], fused silica (SiO 2 ) [62], zinc oxide (ZnO) and gallium arsenide (GaAs) [60] have also been used as substrates.…”
Section: Methodsmentioning
confidence: 99%
“…Each Ti foil (550.01 cm 3 in size) was immersed in 50 ml 30 mass% H 2 O 2 solution which contained 15 mg melamine (C 3 H 6 N 6 ) and 1.0 ml 63 mass% HNO 3 , and maintained at 80 C for 72 h in an oven [18]. The specimen were then rinsed in distilled water, dried at 80 C, and subjected to a thermal treatment at 450 C for 1 h in air before the subsequent PLD growth of ZnO for 15, 30, 45 and 60 min, using a ZnO disk (20 mm in diameter) as a target in an oxygen atmosphere with a partial pressure of ca.…”
Section: Pulsed Laser Deposition Of Zno On Tio 2 Nanowire Arraymentioning
confidence: 99%
“…Various applications of ZnO include transparent conductors [1], UV detectors [2], gas sensors [3], photo detectors [4], surface acoustic wave devices [5], varistors [6] and so on. Different vacuum deposition techniques have been used to grow ZnO thin films such as sputtering [7], chemical vapor deposition (CVD) [8], pulsed laser deposition (PLD) [9], molecular beam epitaxy (MBE) [10], atomic layer deposition (ALD) [11] etc. Among these sputtering is a promising method which can provide a smooth and uniform thin film with good adhesion and better crystallinity.…”
Section: Introductionmentioning
confidence: 99%