Abstract:ZnO thin films have been deposited on glass substrates by radio frequency (RF) magnetron sputtering from a zinc oxide target in order to investigate the effect of RF power and substrate temperature on the properties of the deposited films. The structural and optical properties of the films were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), UV-Vis transmission spectra and photoluminescence (PL). All ZnO thin films exhibited diffraction peak of (002) corresponding… Show more
The development of advanced nanostructured thin films produced by magnetron sputtering has resulted in significant progress in materials science and engineering [...]
The development of advanced nanostructured thin films produced by magnetron sputtering has resulted in significant progress in materials science and engineering [...]
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