“…Varhegyi et al [ 202 ] investigated the influence from corrosive gases such as Cl 2 and SO 2 on the Ga 2 O 3 -sputtered layer and found that Ga 2 O 3 was more resistant against SO 2 but had a very fast reaction with Cl 2 at 800 °C. A screen-printing technique was developed by Frank et al [ 188 ], Pole et al [ 201 ], Wiesner et al [ 195 ], and Biskupski et al [ 196 ] to prepare porous Ga 2 O 3 thick films for detecting oxidizing gases such as CO 2 and O 3 and inflammable gases such as C 4 H 10 and C 3 H 8 , as well as VOCs. Additionally, many other groups such as Macri et al [ 72 ], Ogita et al [ 62 , 63 , 97 , 103 ], Hovhannisyan et al [ 203 ], Dyndal et al [ 204 ], Almaev et al [ 86 , 87 ], Manandhar et al [ 101 ], and Sui et al [ 64 ] studied the gas sensitivities of resistor sensors with sputtering films for O 2 , H 2 , CO, C 7 H 8 , C 2 H 6 O, and C 3 H 6 O.…”