Plasmonic Sensor Monolithically Integrated with a CMOS Photodiode

Shakoor, Abdul; Cheah, Boon Chong; Hao, Danni; Al-Rawhani, Mohammed A.; Nagy, Bence; Grant, James P.; Dale, Carl; Keegan, Neil; McNeil, Calum J.; Cumming, David R. S.

doi:10.1021/acsphotonics.6b00442

Cited by 30 publications

(33 citation statements)

References 43 publications

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“…five times lower than that measured for 0.015 refractive index change. Hence, the sensor system has a detection limit of 0.003 RIU, which is an order of magnitude better than our previous work [23]. However, working at the resolution limit of the detector induces error factors since the noise associated with electronic read-out becomes significant.…”

Section: Resultsmentioning

confidence: 79%

“…Depending on the properties of the analyte, the input wavelength can be adjusted to maximize the performance of the device for a particular analyte. From Figure 7b, we evaluated the sensitivity of the integrated sensing system to be equal to 6.5 V/RIU, which means that for a RIU change, the change in the output electrical signal is 6.5 V. The measured sensitivity value is higher than our previous work on monolithic integration of plasmonic sensors with CMOS PDs [23], [24]. The improvement of sensitivity is due to the narrower resonance linewidth of the gratings structures compared to the plasmonic structures.…”

Section: Resultsmentioning

confidence: 91%

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CMOS Nanophotonic Sensor With Integrated Readout System

et al. 2018

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The measurement of nanophotonic sensors currently requires the use of external measuring equipment for their read-out such as an optical spectrum analyzer, spectrophotometer, or detectors. This requirement of external laboratory-based measuring equipment creates a "chip-in-a-lab" dilemma and hinders the use of nanophotonic sensors in practical applications. Making nanophotonic sensors usable in everyday life requires miniaturization of not only the sensor chip itself but also the equipment used for its measurement. In this paper, we have removed the need of external measuring equipment by monolithically integrating 1-D grating structures with a complementary metal-oxide-semiconductor (CMOS) integrated circuit having an array of photodiodes. By doing so, we get a direct electrical read-out of the refractive index changes induced when applying different analytes to grating structures. The gratings are made of CMOS compatible silicon nitride. Employing a nanophotonic sensor made of CMOS compatible material allows fabrication of the integrated sensor chip in a commercial CMOS foundry, enabling mass production for commercialization with low cost. Our results present a significant step toward transforming present laboratory-based nanophotonic sensors into practical portable devices to enable applications away from the analytical laboratory. We anticipate the work will have a major impact on technology for personalized medicine, environmental, and industrial sensing.

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Section: Resultsmentioning

confidence: 79%

Section: Resultsmentioning

confidence: 91%

CMOS Nanophotonic Sensor With Integrated Readout System

et al. 2018

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“…Monolithic integration of both passive optical sensors and active optoelectronic devices on a single sensor chip is hence highly sought after. [ 199–201 ]…”

Section: Laboratory Prototypes Toward Poc Applicationsmentioning

confidence: 99%

Silicon‐Based Integrated Label‐Free Optofluidic Biosensors: Latest Advances and Roadmap

Wang

Sánchez

Yin

et al. 2020

Adv Materials Technologies

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By virtue of the well‐developed micro‐ and nanofabrication technologies and rapidly progressing surface functionalization strategies, silicon‐based devices have been widely recognized as a highly promising platform for the next‐generation lab‐on‐a‐chip bioanalytical systems with a great potential for point‐of‐care medical diagnostics. Herein, an overview of the latest advances in silicon‐based integrated optofluidic label‐free biosensing technologies relying on the efficient interactions between the evanescent light field at the functionalized surface and specifically bound analytes is presented. State‐of‐the‐art technologies demonstrating label‐free evanescent wave‐based biomarker detection mainly encompass three device configurations, including on‐chip waveguide‐based interferometers, microring resonators, and photonic‐crystal‐based cavities. Moreover, up‐to‐date strategies for elevating the sensitivities and also simplifying the sensing processes are discussed. Emerging laboratory prototypes with advanced integration and packaging schemes incorporating automatic microfluidic components or on‐chip optoelectronic devices lead to one significant step forward in real applications of decentralized diagnostics. Besides, particular attention is paid to currently commercialized label‐free optical bioanalytical models on the market. Finally, the prospects are elaborated with several research routes toward chip‐scale, low‐cost, highly sensitive, multi‐functional, and user‐friendly bioanalytical systems benefiting to global healthcare.

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“…Most of the sensing systems rely on the integration of two or more optoelectronic devices. In this context, a breakthrough in the integration of components for sensing has recently been achieved by Shakoor et al, through the combination of photonic and optoelectronic devices [172]. The authors demonstrated the monolithic integration of a plasmonic grating with a CMOS, acting as photodiode ( Figure 13).…”

Section: Towards Smart Integration Of Nanostructured Components For Tmentioning

confidence: 99%

Section: Towards Smart Integration Of Nanostructured Components For Tmentioning

confidence: 99%

Nanostructured Organic/Hybrid Materials and Components in Miniaturized Optical and Chemical Sensors

et al. 2020

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In the last decade, biochemical sensors have brought a disruptive breakthrough in analytical chemistry and microbiology due the advent of technologically advanced systems conceived to respond to specific applications. From the design of a multitude of different detection modalities, several classes of sensor have been developed over the years. However, to date they have been hardly used in point-of-care or in-field applications, where cost and portability are of primary concern. In the present review we report on the use of nanostructured organic and hybrid compounds in optoelectronic, electrochemical and plasmonic components as constituting elements of miniaturized and easy-to-integrate biochemical sensors. We show how the targeted design, synthesis and nanostructuring of organic and hybrid materials have enabled enormous progress not only in terms of modulation and optimization of the sensor capabilities and performance when used as active materials, but also in the architecture of the detection schemes when used as structural/packing components. With a particular focus on optoelectronic, chemical and plasmonic components for sensing, we highlight that the new concept of having highly-integrated architectures through a system-engineering approach may enable the full expression of the potential of the sensing systems in real-setting applications in terms of fast-response, high sensitivity and multiplexity at low-cost and ease of portability.

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Plasmonic Sensor Monolithically Integrated with a CMOS Photodiode

Cited by 30 publications

References 43 publications

CMOS Nanophotonic Sensor With Integrated Readout System

CMOS Nanophotonic Sensor With Integrated Readout System

Silicon‐Based Integrated Label‐Free Optofluidic Biosensors: Latest Advances and Roadmap

Nanostructured Organic/Hybrid Materials and Components in Miniaturized Optical and Chemical Sensors

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