“…The designed structure displays the most heightened sensitivity (≈23.32 times) than compared to [50] to the best of our knowledge. In addition, the pressure (in the unit of Pa) applied to the designed sensor can be calculated based on the Equations ( 5) and (7). For example, when the parameters of (w, g, N, P, L, h) = (50 nm, 10 nm, 97, 100 nm, 650 nm, 100 nm), the measurable minimum pressures are about 8.404 Pa, 8.410 Pa, and 8.406 Pa for modes 1, 2 and 3, respectively.…”