brings about a high potential application value in many fields such as plasmonic photocatalyst, [6,7] nonlinear optics, [8,9] surface-enhanced spectroscopy, [10,11] solar cells, [12,13] high integration optical devices, [14,15] and metamaterials, [16,17] etc. Among various basic plasmonic structures, the metal-insulator-metal (MIM) configuration that the insulator film is sandwiched between two symmetric metal films is one of the most common units. [18] In this structure, the electric field is strongly constrained, causing a stronger energy confinement effect in deeply subwavelength scale. [19,20] However, due to the presence of metal, a large Ohmic loss is inevitable in the individual plasmonic structures including the traditional MIM geometries, which results in difficulties to achieve strong confinements of electric field with a low loss simultaneously. [21,22] Generally, for the widely used Si-based plasmonic devices, it is an undesirable phenomenon. One of the main reasons is that silicon has a relative large thermo-optic coefficient and the temperature variety induced by Ohmic loss influences its properties seriously, [23,24] leading to the instability and limitations of integration. In addition, the large loss means the low efficiencies for Si-based plasmonic optoelectronic converters as well. [25] In this case, the enhancement of plasmonic mode coupling through engineering of multiple structures may realize a reduction of the Ohmic losses, [21,26] and some composite structures are constantly designed to achieve the mode coupling. Exciting surface lattice resonances (SLRs) is a line of thought for reducing losses, but it is usually supported by nanorods or nanoparticles, and coupled with localized surface plasmon resonances (LSPRs). [27][28][29] Thus, further investigations of novel microstructures based on propagating plasmon resonances are necessary.According to the contents above, first, we demonstrate a microstructure of multilayer grating including MIM waveguides inside. Alternate Al and Si layers are utilized to replace the traditional single material grating stripes on the Si substrate. Not only will SPPs be excited by the grating-shaped structure, but also the standing wave resonance will be formed by Fabry-Perot (F-P) cavities that consist of MIM waveguides. Then we demonstrate a microstructure of multilayer trench grating including both stripes and trenches. The section of multilayer grating stripes can also perform a narrowband F-P resonance through MIM structures. Meanwhile, the multilayer For common plasmonic structures, it is difficult to considerate both the abilities of confining light and reducing loss. Here, two plasmonic multilayer structures comprised of five alternate Al and Si layers are demonstrated. First, the multilayer gratings with near-infrared dual narrowband peaks are given in the spectrum excited by Fabry-Perot resonance. Through investigating the modes of electric field distributions, the frequency-sensitivity, and linear designable characteristic of its working bands are cl...