Plasmapolymerisation in strömenden Argon/p‐Xylol‐Glimmentladungen. Teil. 3. Untersuchungen des Schichtwachstums und der Schichteigenschaften

Abstract

In der positiven Saule eines stromenden Ar/p-Xylol-Plasmas wurden Schichtwachstum und Eigenschaften der entstandenen Glimmpolymerschichten untersuchl. Elementaranalyse, Infrarotspektroskopie, Thermoanalyse und Loslichkeit ergeben eine variierende Zusammensetzung der Schichten langs der positiven Saule. IlnaaMnnarc no~m~epuaaqusc e m e q t q e a maeroqea p a a p d e caecu apzona u n-IFemoJca Yacmb 3 . Nccnedoeanua pocma u csoiLcme cnoa BaBmnxcR IIOJIEl MepHbIX CaoeB. MeTOAaMa aaeMeHTapHoro aHmma, HK-cnempocxonna II TepMoaHmnsa n aay-Plasma polymerization in flowing argonlp-xylene glow discharge. Part 3. Investigation of growing rate and properties of the layers The growing rate and the properties of glow discharge layers, created in the positive column of a flowing Ar/p-xylene plasma, were investigated. Element analysis, infrared spectroscopy, thermal analysis and solubility show different compositioh of the layers along the positive column B rIOJIOHEIITeJIbHOM CTOJI6e TeXyaea IlJIaaMbI CMeCH aprOHa II rI-XCHJIOJIa IICCJIeAOBaJIHCb POCT II CBOfi CTBa 06paao-PeHBeM PaCTBOPHMOCTH yCTlIHOBJIeH0 HaMeHeHHe COCTaBa CJIOeB BAOJIb IIOJIOHcHTeJIbHOrO c~oa6a.

Plasma polymerization of phenylsilane

“…Aromatic compounds such as benzene, toluene, xylene, styrene, etc, were chosen for this purpose. [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] These compounds, however, were subjected to ring-opening reactions in a discharge state and yielded plasma polymers containing alkyl chains rather than aromatic groups. This unexpected evidence in these plasma polymerizations may be the result of activation processes by the action of plasma.…”