Plasmachemie heterogener Systeme

Plasma Reactions

“…In the context of this article, the term "plasma processes" refers to processes in which plasmas are employed to alter the physical properties and/or the chemical composition of substances or surfaces. Such processes include, in particular, the field of plasma chemistry [9][10][11].…”

“…Wellknown applications include welding, cutting, melting, etching, thin-film deposition, switching, and lighting. In the context of this article, the term "plasma processes" refers to processes in which plasmas are employed to alter the physical properties and/or the chemical composition of substances or surfaces [9][10][11].…”