2015
DOI: 10.1021/acsnano.5b04265
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Plasma-Treated Thickness-Controlled Two-Dimensional Black Phosphorus and Its Electronic Transport Properties

Abstract: We report the preparation of thickness-controlled few-layer black phosphorus (BP) films through the modulated plasma treatment of BP flakes. Not only does the plasma treatment control the thickness of the BP film, it also removes the chemical degradation of the exposed oxidized BP surface, which results in enhanced field-effect transistor (FET) performance. Our fabricated BP FETs were passivated with poly(methyl methacrylate) (PMMA) immediately after the plasma etching process. With these techniques, a high fi… Show more

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Cited by 181 publications
(207 citation statements)
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“…Jia et al212 adopted a plasma‐etching treatment not only to control the thickness of BP flakes but also to remove the chemical degradation caused on exposed oxidized BP surfaces. The thickness control of few‐layer BP was tuned by the plasma etching time.…”
Section: Fabrication Of Few‐layered Bpmentioning
confidence: 99%
“…Jia et al212 adopted a plasma‐etching treatment not only to control the thickness of BP flakes but also to remove the chemical degradation caused on exposed oxidized BP surfaces. The thickness control of few‐layer BP was tuned by the plasma etching time.…”
Section: Fabrication Of Few‐layered Bpmentioning
confidence: 99%
“…18,19 BP has strong in-plane bonds in conjunction with weak van der Waals interlayer interactions thereby enabling exfoliation into few-layer BP sheets or phosphorene (single-layer BP). [20][21][22][23][24] Since 2014, BP has attracted tremendous research interest [25][26][27][28][29][30][31][32][33][34][35][36][37][38] because of its unique properties such as layerdependent direct bandgap, 28,39 anisotropy, 25,26,31,32,34,40 hingelike structure, 41 and quasi-one-dimensional excitonicnature, 42 all of which contrast markedly with those of other types of 2D materials. Nevertheless, BP degrades under ambient conditions as a result of the reaction with oxygen (P→P x O y ) and subsequent transformation to PO 4 3-in the presence of water.…”
Section: Introductionmentioning
confidence: 99%
“…The V oc and I sc comparisons between the three devices containing different layer number variations suggest potential photovoltaic engineering by tailoring the thicknesses and their difference of the flakes which can be realized through fabrication techniques such as etching. [49][50][51] Further comparison between the three devices is made in terms of their P el , EQE, and η with the results given in Figure 4c-e, respectively. In Figure 4c, we see that D1 produced the largest electrical power while it has the least appealing EQE performance as shown in Figure 4b.…”
Section: Photovoltaics In Bp Heterojunction Diodementioning
confidence: 99%