Cotton fabrics were treated by radio-frequency plasma with tetrafluoromethane (CF 4 ) and hexafluoropropene (C 3 F 6 ) gases under different exposure times, pressures, and power levels. The hydrophobicity and water repellency were analyzed with measurements of the cosine of the contact angle (cos ) and wet-out time. The hydrophobicity was enhanced with treatments of both gases. Xray photoelectron spectroscopy (XPS) revealed increases in the surface fluorine content of 1-2% for CF 4 plasma and of 2.3-7.8% for C 3 F 6 plasma. The relative chemical composition of the C 1s spectra after CF 4 and C 3 F 6 plasma treatments showed increases in the relative amounts of OCOOOCO and fluorocarbon groups (OCF, OCF 2 , and OCF 3 ), whereas peak areas for OCOH and OCOOH decreased. The hydrophobicity was enhanced by the increase in the fluorine content and fluorocarbon groups. C 3 F 6 plasma treatment resulted in higher hydrophobicity than CF 4 plasma treatment according to not only cos and wet-out measurements but also XPS analysis.