2004
DOI: 10.1016/j.vacuum.2004.01.038
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Plasma surface treatment effect of TiO2 thin film

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Cited by 19 publications
(8 citation statements)
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“…Several methods had been used to increase the photoactivity of TiO 2 under visible light region such as ion implantation, doping with metals, and plasma treatment. [4][5][6][7][8][9][10][11] Our research group and other research groups have reported that the modification of TiO 2 surface with irradiation technology can increase its photoactivity, explaining the increase in Ti 3+ and O − surface states of modified TiO 2 . [12][13][14][15][16] Regarding the oxygen state of modified TiO 2 , the formation of O − which is deeply related to oxygen vacancy is considered to be very important for the photocatalytic oxidation process.…”
Section: Introductionmentioning
confidence: 61%
“…Several methods had been used to increase the photoactivity of TiO 2 under visible light region such as ion implantation, doping with metals, and plasma treatment. [4][5][6][7][8][9][10][11] Our research group and other research groups have reported that the modification of TiO 2 surface with irradiation technology can increase its photoactivity, explaining the increase in Ti 3+ and O − surface states of modified TiO 2 . [12][13][14][15][16] Regarding the oxygen state of modified TiO 2 , the formation of O − which is deeply related to oxygen vacancy is considered to be very important for the photocatalytic oxidation process.…”
Section: Introductionmentioning
confidence: 61%
“…During p-layer deposition on TiO 2 , the generated H 2 -plasma reduced underlying TiO 2 . Here, oxygen binding in TiO 2 becomes weakened, and oxygen was desorbed from the TiO 2 [34]. This liberated oxygen was likely to be incorporated in the p-a-SiO x :H layer during plasma deposition, which could deteriorate the optimized boron-doping level of the p-layer and increase activation energy [35].…”
Section: Resultsmentioning
confidence: 99%
“…[5][6][7] From the experimental results of these authors thus far, it has been clarified that, in the gas mixture of Ar + O 2 in the vacuum chamber, the electrons and oxygen radicals generated in the plasma temporarily adhere to the poly(ethylene naphthalate) (PEN) film surface and cause chemical reaction on the surface to improve hydrophilicity. [8][9][10] Thus, plasma surface treatment is a useful technique for enhancing the adhesive properties in the cluster manufacturing industry of flexible solar cells.…”
Section: Introductionmentioning
confidence: 99%