2020
DOI: 10.1088/1361-6463/ab6625
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Plasma properties as function of time in Ar/C2H2 dust-forming plasma

Abstract: The time-dependent properties of an Ar/C2H2 dusty plasma (neutral, ion and electron densities, effective electron temperature and dust charge) are studied using a volume-averaged model for conditions corresponding to experiments on nanoparticle growth. The calculated density evolution for C2H2, H2 and C4H2 molecules are compared with time-resolved measurement of the mass peaks of the neutral species and the effects of the dust density on the plasma properties are analyzed. Time evolutions of the main positive … Show more

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Cited by 15 publications
(33 citation statements)
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“…The input fluxes of acetylene and argon are taken to be 1.5 sccm and 11.0 sccm, respectively, as in the experiment of our interest [7 -9]. It is assumed that the energy distribution for ions is Maxwellian, and that the ions and dust particles are at gas temperature T g (300 K), while the electron energy distribution function (EEDF) F is assumed to be Druyvesteyn-like [7,9]. The EEDF has the follow- (2 / 3 ) ( )…”
Section: Main Equations and Assumptionsmentioning
confidence: 99%
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“…The input fluxes of acetylene and argon are taken to be 1.5 sccm and 11.0 sccm, respectively, as in the experiment of our interest [7 -9]. It is assumed that the energy distribution for ions is Maxwellian, and that the ions and dust particles are at gas temperature T g (300 K), while the electron energy distribution function (EEDF) F is assumed to be Druyvesteyn-like [7,9]. The EEDF has the follow- (2 / 3 ) ( )…”
Section: Main Equations and Assumptionsmentioning
confidence: 99%
“…The model accounts for various processes of the loss and generation of the discharge species, including the processes on dust particles and plasma walls, the collisional processes in the bulk plasma, as well as the pumping of gas in and out of the chamber. The processes and their rates are described in [7,9]. The effective electron temperature is found from the power balance equation…”
Section: Main Equations and Assumptionsmentioning
confidence: 99%
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