Plasma Polymerized Multi-Layered Photonic Films

Jiang, Hao; Johnson, Walter; Grant, John T.; Eyink, Kurt G.; Johnson, Eric; Tomlin, D. W.; Bunning, Timothy J.

doi:10.1021/cm0206542

Cited by 48 publications

(57 citation statements)

References 26 publications

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“…FTIR showed that the original OFCB ring structure was almost entirely destroyed during plasma polymerization, and that several different CF X structural groups were present in the film [15]. This agrees with the XPS results obtained from the PP-OFCB film reported above.…”

Section: Characterization Of the Filmssupporting

confidence: 91%

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The growth and characterization of photonic thin films

Grant

Jiang

Tullis

et al. 2005

Vacuum

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Section: Characterization Of the Filmssupporting

confidence: 91%

“…This indicates good control over the deposition conditions and also that PECVD of organic precursors can be utilized to deposit optical films with good thickness control. SEM studies of the cross-section of the 10-bilayer stack show that the individual layers are dense and have good adhesion [15].…”

Section: Fabrication Of a Notch Filtermentioning

confidence: 99%

The growth and characterization of photonic thin films

Grant

Jiang

Tullis

et al. 2005

Vacuum

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“…This technique is a solventless (dry) process, resulting in organic films with high solvent, scratch, and corrosion resistance combined with excellent thermal and chemical stability. [152,153] The underlying mechanism of plasma polymerization involves in organic species undergoing fragmentation in plasma, resulting in excited sub-monomer species, free radicals, and ions that can react with each other in the plasma zone, or at the nascent surface layer (Fig. 10).…”

Section: Polymer Layersmentioning

confidence: 99%

Bimaterial Microcantilevers as a Hybrid Sensing Platform

et al. 2008

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Microcantilevers, one of the most common MEMS structures, have been introduced as a novel sensing paradigm nearly a decade ago. Ever since, the technology has emerged to find important applications in chemical, biological and physical sensing areas. Today the technology stands at the verge of providing the next generation of sophisticated sensors (such as artificial nose, artificial tongue) with extremely high sensitivity and miniature size. The article provides an overview of the modes of detection, theory behind the transduction mechanisms, materials employed as active layers, and some of the important applications. Emphasizing the material design aspects, the review underscores the most important findings, current trends, key challenges and future directions of the microcantilever based sensor technology.

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“…[13][14][15][16][17] The most efficient vapor-responsive material, from a series of six polymers tested in this study, was plasma-polymerized methacrylonitrile (PP-MAN) (Fig. 1b and Supporting Information, SI).…”

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confidence: 99%

Polymer–Silicon Flexible Structures for Fast Chemical Vapor Detection

et al. 2007

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Although there are several aspects that contribute to an efficient chemical sensor system, the choice of responsive materials can help to optimize several key attributes critical for their ultimate performance, specifically high sensitivity, selectivity, fast response time, and wide dynamic range. Some common issues reported to date for sensors are limited detection range, slow response time, long recovery period, and fast saturation (limited dynamic range).[1] Most of these issues are directly related to the large volume of bulk porous material that is needed for measurable signal output, which leads to inherently slow sorption, diffusion, and desorption processes. One type of gas sensor that receives only limited attention despite being among the most frequently used sensors for measuring important environmental quantities is the humidity sensor.[2]Important applications of this type of sensor include for respiratory equipment, incubators, chemical gas purification, and surgical operations. The main requirements for humidity sensors are good sensitivity over a wide humidity range, low hysteresis, good reproducibility, and longevity. [2,3] Often sensors are required to be very small and suitable for integration into arrayed systems, such as odor-sensing arrays. Humidity sensors currently tend to exploit the characteristics of bulk materials with the required resistive and capacitive response properties. This type of sensor comprises a moisture sensitive ceramic, metal, or polymer material that undergoes changes in resistance or capacitance with variations in ambient humidity. [3,4] Water vapor sensors that use polymeric materials commonly incorporate polyimides, polycarbonates, cellulose acetates, or conductive polymers. [5,6] The typical vapor sensitivity of such sensors is of the order of tens of parts per million (or ±0.05 % relative humidity, RH), which is sufficient for most routine measurements. However, this is not acceptable if a fast, real-time monitoring of vapor content variation is required. Increased sensitivity, to a low ppm level, can be achieved using a porous material to maximize the specific surface area available for water vapor adsorption. [7][8][9] For example, 0.4 ppm v (parts per million by volume) water vapor detection was demonstrated by Salonen et al. using carbonized porous silicon.[9] Bruno et al. used a polymer-coated resonant device to obtain a sensitivity of 7 ppm v .[10] In these cases, although the sensors reported showed good sensitivity they suffered sluggish response times, often requiring a few minutes to completely recover. Currently, modest sensitivity and slow response are the main obstacles to the design and development of microcantilever-based sensor technology. [11,12] In this Communication, we present a bimaterial design for humidity sensing with a vapor-sensitive plasma-polymerized nanolayer coating on a silicon microcantilever with a low flexural rigidity (Fig. 1a,d). The coating acts as a sensitive mechanical actuator, which mediates high internal stresses, enabling...

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Plasma Polymerized Multi-Layered Photonic Films

Cited by 48 publications

References 26 publications

The growth and characterization of photonic thin films

The growth and characterization of photonic thin films

Bimaterial Microcantilevers as a Hybrid Sensing Platform

Polymer–Silicon Flexible Structures for Fast Chemical Vapor Detection

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