Plasma parameter bi-stability in e-beam sustained discharge in Xe

Dyatko, N. A.; Napartovich, Anatoly P.

doi:10.1088/0022-3727/36/17/312

Cited by 8 publications

(9 citation statements)

References 18 publications

(32 reference statements)

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“…Figure 33 demonstrates calculated mean electron energy and plasma electron current density for non-self-sustained discharge in Xe at atmospheric pressure as functions of E/N [109]. Within the interval of q values 10 14 cm −3 s −1 < q < 10 17 cm −3 s −1 the bi-stability is clearly seen.…”

Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

“…It was found for Xe [109] and Kr [110] that in a certain range of q (production rate of electrons in the energy range 0 u I ) and E/N values two different stable plasma states exist, the effect is more pronounced in the case of Xe. For an Ar plasma [110], the BE has a unique solution over the entire parameter range under study.…”

Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

“…Since the bistability effect has been found at rather low electric fields, the situation considered can be realized in the decaying plasma or in non-self-sustained discharge. This opportunity was examined in [109,110], in which the EEDFs in plasma of steady-state EBSD in heavy rare gases (Xe [109] and Ar, Kr [110]) were calculated.…”

Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

“…The BE for the EEDF in plasma of steady-state EBSD was discussed in section 4.2. Under conditions considered in [109,110] the secondary electrons lose their energy in elastic and inelastic collisions and disappear when recombining with positive molecular ions (Xe + 2 , Ar + 2 , Kr + 2 ), which are the dominant ions in plasma. In [109,110] recombination processes were taken into account in BE, and the EEDF and the electron concentration were calculated in a self-consistent manner.…”

Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

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Non-thermal plasma instabilities induced by deformation of the electron energy distribution function

Dyatko

Кочетов

Napartovich

2014

Plasma Sources Sci. Technol.

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Non-thermal plasma is a key component in gas lasers, microelectronics, medical applications, waste gas cleaners, ozone generators, plasma igniters, flame holders, flow control in high-speed aerodynamics and others. A specific feature of non-thermal plasma is its high sensitivity to variations in governing parameters (gas composition, pressure, pulse duration, E/N parameter). This sensitivity is due to complex deformations of the electron energy distribution function (EEDF) shape induced by variations in electric field strength, electron and ion number densities and gas excitation degree. Particular attention in this article is paid to mechanisms of instabilities based on non-linearity of plasma properties for specific conditions: gas composition, steady-state and decaying plasma produced by the electron beam, or by an electric current pulse. The following effects are analyzed: the negative differential electron conductivity; the absolute negative electron mobility; the stepwise changes of plasma properties induced by the EEDF bi-stability; thermo-current instability and the constriction of the glow discharge column in rare gases. Some of these effects were observed experimentally and some of them were theoretically predicted and still wait for experimental confirmation.

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Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

Section: Eedf Bi-stability In Plasma Of Heavy Rare Gasesmentioning

confidence: 99%

See 2 more Smart Citations

Non-thermal plasma instabilities induced by deformation of the electron energy distribution function

Dyatko

Кочетов

Napartovich

2014

Plasma Sources Sci. Technol.

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“…Non-self-sustained discharges (sustained by a beam of fast electrons) were considered in Refs. [20,21], in which the possibility of the existence of the EEDF bistability was theoretically analyzed in Ar, Kr and Xe. It was shown that the bistability effect takes place in Xe and Kr, while for an Ar plasma [21], the BE has a unique solution over the entire parameter range examined.…”

Section: Introductionmentioning

confidence: 99%

Bistable solutions for the electron energy distribution function in electron swarms in xenon: a comparison between the results of first-principles particle simulations and conventional Boltzmann equation analysis

Dyatko

2015

Plasma Sources Sci. Technol.

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At low reduced electric elds the electron energy distribution function in heavy noble gases can take two distinct shapes. This 'bistability effect'-in which electron-electron (Coulomb) collisions play an essential role-is analyzed here for Xe with a Boltzmann equation approach and with a rst principles particle simulation method. The solution of the Boltzmann equation adopts the usual approximations of (i) searching for the distribution function in the form of two terms ('two-term approximation'), (ii) neglecting the Coulomb part of the collision integral for the anisotropic part of the distribution function, (iii) treating Coulomb collisions as binary events, and (iv) truncating the range of the electron-electron interaction beyond a characteristic distance. The particle-based simulation method avoids these approximations: the many-body interactions within the electron gas with a true (un-truncated) Coulomb potential are described by a molecular dynamics algorithm, while the collisions between electrons and the background gas atoms are treated with Monte Carlo simulation. We nd a good general agreement between the results of the two techniques, which con rms, to a certain extent, the approximations used in the solution of the Boltzmann equation. The differences observed between the results are believed to originate from these approximations and from the presence of statistical noise in the particle simulations.

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Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics

Lee

2018

Applied Physics Reviews

117

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Many different gas discharges and plasmas exhibit bistable states under a given set of conditions, and the history-dependent hysteresis that is manifested by intensive quantities of the system upon variation of an external parameter has been observed in inductively coupled plasmas (ICPs). When the external parameters (such as discharge powers) increase, the plasma density increases suddenly from a low- to high-density mode, whereas decreasing the power maintains the plasma in a relatively high-density mode, resulting in significant hysteresis. To date, a comprehensive description of plasma hysteresis and a physical understanding of the main mechanism underlying their bistability remain elusive, despite many experimental observations of plasma bistability conducted under radio-frequency ICP excitation. This fundamental understanding of mode transitions and hysteresis is essential and highly important in various applied fields owing to the widespread use of ICPs, such as semiconductor/display/solar-cell processing (etching, deposition, and ashing), wireless light lamp, nanostructure fabrication, nuclear-fusion operation, spacecraft propulsion, gas reformation, and the removal of hazardous gases and materials. If, in such applications, plasma undergoes a mode transition and hysteresis occurs in response to external perturbations, the process result will be strongly affected. Due to these reasons, this paper comprehensively reviews both the current knowledge in the context of the various applied fields and the global understanding of the bistability and hysteresis physics in the ICPs. At first, the basic understanding of the ICP is given. After that, applications of ICPs to various applied fields of nano/environmental/energy-science are introduced. Finally, the mode transition and hysteresis in ICPs are studied in detail. This study will show the fundamental understanding of hysteresis physics in plasmas and give open possibilities for applications to various applied fields to find novel control knob and optimizing processing conditions.

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Plasma parameter bi-stability in e-beam sustained discharge in Xe

Cited by 8 publications

References 18 publications

Non-thermal plasma instabilities induced by deformation of the electron energy distribution function

Non-thermal plasma instabilities induced by deformation of the electron energy distribution function

Bistable solutions for the electron energy distribution function in electron swarms in xenon: a comparison between the results of first-principles particle simulations and conventional Boltzmann equation analysis

Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics

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