“…Moreover, the plasma properties are extremely sensitive to the operating parameters. Mathematical modeling and theoretical modeling reveal that this sensitivity is attributed to complex changes in the electron energy distribution function (EEDF) caused by small changes in electric field intensity, the electrons and ion density, the gas excitation degree, and the secondary electron emission from the surfaces. − Therefore, balancing the variables, including incident ions, metastable particles and free radical fluxes, and the ion energy by regulating the discharge characteristics of plasma, and revealing the interaction mechanism between plasma active particles and surfaces is the key to realize the controllable induction of material surface defects. − In light of this consideration, three variables, which are feeding gases, plasma pressure, and electric power, will be discussed in detail, as they serve important roles during the NTP modifications.…”